{"id":"W2015172374","doi":"10.1117/12.543395","title":"Precise surface profilometry based on low-coherence interferometry","year":2003,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Optical measurement and interference techniques","field":"Computer Science","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Profilometer; Interferometry; Coherence (philosophical gambling strategy); Optics; Computer science; Materials science; Physics; Surface roughness","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005793204,0.0009296622,0.0006392791,0.001776779,0.0002962247,0.001180829,0.0008257594,0.0007013465,0.001821022],"category_scores_gemma":[0.001643184,0.0005809912,0.0003478425,0.001976314,0.0008694884,0.001837599,0.00120972,0.000925783,0.001103874],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007457006,"about_ca_system_score_gemma":0.0004377193,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001341096,"about_ca_topic_score_gemma":0.001905123,"domain_scores_codex":[0.9985618,0.0002067699,0.00005007043,0.0002808894,0.0007766603,0.0001238534],"domain_scores_gemma":[0.9987394,0.0003759266,0.0001595241,0.000328719,0.0003530254,0.00004345586],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001592691,0.00006378059,0.002739828,0.0003276574,0.00003704697,0.0001171738,0.0002477669,0.01189799,0.8039023,0.007329933,0.002259454,0.1709178],"study_design_scores_gemma":[0.00006743897,0.0004635655,0.01383424,0.00005831048,0.00004814913,0.0004759002,0.0002067322,0.4484639,0.5148907,0.00792829,0.01329442,0.0002682804],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1550511,0.00127738,0.8324456,0.0002566838,0.0001245216,0.0001949963,0.0007794359,0.003705528,0.006164734],"genre_scores_gemma":[0.6299472,0.001008363,0.3660296,0.0001379926,0.00006357518,0.0002454855,0.0008337428,0.0002517354,0.001482317],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001821022,"threshold_uncertainty_score":0.006091893,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01901173692711312,"score_gpt":0.2409027420622299,"score_spread":0.2218910051351168,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}