{"id":"W2016055653","doi":"10.4028/www.scientific.net/ssp.103-104.237","title":"Prevention of Copper Cross-Contamination on Cu Process and Non-Cu Process Mixed Fabrication","year":2005,"lang":"en","type":"article","venue":"Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Mitel (Canada)","funders":"","keywords":"Materials science; Fabrication; Wafer; Contamination; Copper; Process (computing); Wafer fabrication; Metallurgy; Nanotechnology; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.001403339,0.001183802,0.001525462,0.0007915866,0.0005825067,0.0006419879,0.001402887,0.000211953,0.000121982],"category_scores_gemma":[0.0001464135,0.001102308,0.0001534419,0.0009987915,0.0003794087,0.003184511,0.0005872438,0.0007469595,0.00009829291],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002600079,"about_ca_system_score_gemma":0.0001940157,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001708386,"about_ca_topic_score_gemma":0.0006489571,"domain_scores_codex":[0.9931878,0.0002428673,0.002086286,0.002052706,0.001022964,0.001407338],"domain_scores_gemma":[0.9951793,0.0002068625,0.0008019769,0.002454072,0.0007533603,0.0006044147],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.004183535,0.00809818,0.01880529,0.01212433,0.008745392,0.0001216485,0.09076469,0.219881,0.1201823,0.0004439003,0.0398097,0.47684],"study_design_scores_gemma":[0.01335301,0.001982782,0.01283965,0.001447756,0.001567407,0.00005892706,0.006977584,0.8801362,0.03401376,0.005067945,0.03658108,0.005973917],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9735352,0.0009595456,0.006279033,0.00008522506,0.0004966347,0.001554878,0.01530892,0.0003506368,0.001429879],"genre_scores_gemma":[0.9671349,0.005266274,0.0001445758,0.0001762714,0.0003676872,0.000168747,0.02589444,0.0002089303,0.0006381914],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.6602551,"threshold_uncertainty_score":0.9991427,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0231450367888523,"score_gpt":0.3051339273557195,"score_spread":0.2819888905668673,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}