{"id":"W2016489274","doi":"10.1007/s11664-005-0180-8","title":"Texture investigation of copper interconnects with a different line width","year":2005,"lang":"en","type":"article","venue":"Journal of Electronic Materials","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":15,"is_retracted":false,"has_abstract":false,"ca_institutions":"McGill University","funders":"","keywords":"Materials science; Electron backscatter diffraction; Copper interconnect; Microstructure; Annealing (glass); Line width; Texture (cosmology); Diffraction; Grain boundary; Interconnection; Composite material; Copper; Optics; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0009658624,0.0001969193,0.0005726609,0.0001098854,0.00005152721,0.00009144372,0.0003048032,0.00009296632,0.001617132],"category_scores_gemma":[0.0001202978,0.00011197,0.00007768246,0.00009560552,0.0001588361,0.0002871382,0.00004925892,0.0001758808,0.00001138842],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001825389,"about_ca_system_score_gemma":0.0003150426,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002475787,"about_ca_topic_score_gemma":0.00009768369,"domain_scores_codex":[0.9980778,0.0001870713,0.000859391,0.0001838097,0.0003405719,0.0003514119],"domain_scores_gemma":[0.9984258,0.0000978607,0.0008019454,0.0002359724,0.0003345059,0.0001039426],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0005204541,0.00009158425,0.000210022,0.00007613497,0.00003691288,0.00000314012,0.0004438836,0.00009357235,0.9968664,0.0006329098,0.0005627878,0.000462205],"study_design_scores_gemma":[0.0008634996,0.001757437,0.0008516371,0.0002717461,0.00006213406,0.000171137,0.0000511959,0.00001747455,0.9934778,0.001243742,0.001093894,0.0001382691],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9974779,0.0003724773,0.0002220324,0.001312403,0.0003579656,0.0001668572,0.00001483089,0.0000145548,0.00006094523],"genre_scores_gemma":[0.9988679,0.00005085739,0.0003312229,0.0001909329,0.0004502608,0.000004040585,0.000002906713,0.00001842247,0.00008343715],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003388559,"threshold_uncertainty_score":0.9992955,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008532280155451485,"score_gpt":0.2342863828272517,"score_spread":0.2257541026718002,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}