{"id":"W2017188542","doi":"10.1109/omems.2012.6318822","title":"High fill factor MEMS mirror array","year":2012,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Microsemi (Canada)","funders":"","keywords":"Microelectromechanical systems; Fabrication; Profilometer; Optics; Materials science; Optoelectronics; Computer science; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002255694,0.0003001169,0.0003280393,0.0002339114,0.0002757136,0.0003732992,0.0007169495,0.000526468,0.001437406],"category_scores_gemma":[0.0003058521,0.0002873753,0.0001871619,0.0001440681,0.0001640246,0.0003916813,0.0002796684,0.0002357388,0.0008968757],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003327185,"about_ca_system_score_gemma":0.0002521088,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003592286,"about_ca_topic_score_gemma":0.0006594172,"domain_scores_codex":[0.9995814,0.00002846943,0.00001904255,0.00008905878,0.0002358688,0.0000461922],"domain_scores_gemma":[0.9996773,0.00005012493,0.00005178319,0.00006256678,0.0001298477,0.00002829475],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003658722,0.000009612491,0.0001757933,0.00001476129,0.000003637539,0.00004658231,0.00001051172,0.0001936987,0.99484,0.0001748301,0.0001265606,0.004367427],"study_design_scores_gemma":[0.0000176125,0.0002806669,0.001694441,0.000002277171,0.000007879849,0.0002674747,0.000008747355,0.005589667,0.9882591,0.00006519769,0.003792995,0.00001406051],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8893869,0.000713598,0.09304754,0.0003795717,0.0002266178,0.0001464541,0.0005347606,0.001647347,0.01391729],"genre_scores_gemma":[0.9136776,0.0001715701,0.07645548,0.000129178,0.0000609921,0.00007283819,0.0002208209,0.00005925634,0.009152194],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001437406,"threshold_uncertainty_score":0.004808545,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01650229566340346,"score_gpt":0.2255026483449721,"score_spread":0.2090003526815686,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}