{"id":"W2017347554","doi":"10.1109/icecs.2014.7050012","title":"Resonant-based test method for MEMS devices","year":2014,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"","keywords":"Microelectromechanical systems; Capacitive sensing; Capacitance; Electronic engineering; Amplitude; Electronic circuit; Inductor; Parasitic capacitance; Materials science; Computer science; Engineering; Electrical engineering; Optoelectronics; Physics; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004003217,0.0004214139,0.0004139683,0.0006449783,0.0003270785,0.0003637622,0.001372845,0.0007253761,0.004207625],"category_scores_gemma":[0.001226273,0.0002310978,0.0002615227,0.0002168813,0.0004572092,0.0007719429,0.0006989717,0.0005414358,0.001373653],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004397867,"about_ca_system_score_gemma":0.0002193469,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002493404,"about_ca_topic_score_gemma":0.0003790765,"domain_scores_codex":[0.9988605,0.0001108514,0.00004415885,0.0001931465,0.0007254403,0.00006599357],"domain_scores_gemma":[0.9991043,0.0003117516,0.0001084966,0.0001691247,0.0002659074,0.00004036341],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001757879,0.00005388175,0.0006241506,0.0002825688,0.00002609045,0.0002371161,0.0001088574,0.0006295835,0.9084145,0.004853749,0.001161244,0.08343259],"study_design_scores_gemma":[0.00005833644,0.0006624367,0.001799435,0.00003407706,0.00004811497,0.001720117,0.00006426789,0.03284558,0.9461746,0.0016126,0.01492472,0.00005568004],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.09933786,0.001810156,0.8819147,0.0003247495,0.0006306018,0.000459951,0.0001907209,0.003295605,0.01203557],"genre_scores_gemma":[0.6832733,0.0004157132,0.3073643,0.0004502669,0.0001127172,0.0003768852,0.0001418663,0.0002098719,0.007655114],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004207625,"threshold_uncertainty_score":0.01407588,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01260124293845031,"score_gpt":0.2685736048849249,"score_spread":0.2559723619464745,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}