{"id":"W2018319051","doi":"10.1116/1.1752913","title":"Studies of oxide desorption from GaAs substrates via Ga2O3 to Ga2O conversion by exposure to Ga flux","year":2004,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":58,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; Institute for Microstructural Sciences","funders":"","keywords":"Oxide; Wafer; Substrate (aquarium); Desorption; Thermal desorption; Materials science; Analytical Chemistry (journal); Flux (metallurgy); Silicon; Surface roughness; Gallium; Chemical engineering; Chemistry; Optoelectronics; Adsorption; Metallurgy; Composite material; Chromatography; Physical chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005334056,0.0002193256,0.0004040461,0.0006575545,0.0001736098,0.000110441,0.0003020257,0.00008888511,0.000004713616],"category_scores_gemma":[0.00003194528,0.0001707418,0.00003061593,0.0006982479,0.0002305649,0.00033853,0.00006734208,0.0001672862,3.75288e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002190079,"about_ca_system_score_gemma":0.0001162441,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000005946155,"about_ca_topic_score_gemma":0.000007239599,"domain_scores_codex":[0.998551,0.000010875,0.0004588665,0.0002578979,0.0003514526,0.0003699122],"domain_scores_gemma":[0.9991356,0.00001072749,0.0002118418,0.0001204708,0.0003982435,0.000123178],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004129721,0.00001350358,0.0005013426,0.00008148683,0.00005413424,9.206098e-7,0.0007088503,0.0001267681,0.9947374,0.00004264445,0.00002537027,0.003666219],"study_design_scores_gemma":[0.0005205187,0.0006600213,0.0009534102,0.0001739953,0.00005345628,0.00003260398,0.0005051635,0.00001427083,0.9895122,0.007209718,0.0001690567,0.0001955939],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9555268,0.04276126,0.001179314,0.0001959585,0.0001746341,0.0001221925,0.000006099591,0.00002914951,0.000004595845],"genre_scores_gemma":[0.9961162,0.0006095456,0.003156817,0.00005912898,0.00003852785,0.000003266427,8.851623e-7,0.00001420348,0.000001457057],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04215172,"threshold_uncertainty_score":0.6962649,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01604385988524052,"score_gpt":0.2334365056620467,"score_spread":0.2173926457768062,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}