{"id":"W2018394684","doi":"10.1109/ultsym.2006.287","title":"3K-1 Integrated and Flexible Piezoelectric Ultrasonic Transducers","year":2006,"lang":"en","type":"article","venue":"","topic":"Ultrasonics and Acoustic Wave Propagation","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Materials science; Piezoelectricity; PMUT; Ultrasonic sensor; Fabrication; Ceramic; Composite material; Transducer; Capacitive micromachined ultrasonic transducers; Substrate (aquarium); Dielectric; Coating; Electrode; Optoelectronics; Acoustics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002412777,0.0003805834,0.0005299248,0.0003825887,0.0001697574,0.0005065055,0.0008030928,0.0007122234,0.002393805],"category_scores_gemma":[0.0004651906,0.0004255863,0.0002504185,0.0003972108,0.0003099024,0.0005850429,0.000483236,0.0004928638,0.001407531],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005638386,"about_ca_system_score_gemma":0.0004084825,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001078218,"about_ca_topic_score_gemma":0.002053407,"domain_scores_codex":[0.999493,0.00001546341,0.00001901956,0.0001126114,0.0002813837,0.00007843463],"domain_scores_gemma":[0.9996394,0.00004232722,0.00007650471,0.0000428932,0.0001613784,0.0000374761],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005712388,0.00001608839,0.0003288801,0.00006614161,0.000006751735,0.000100553,0.00004250498,0.0004380585,0.9805518,0.0005149957,0.0007184732,0.01715858],"study_design_scores_gemma":[0.00006403646,0.0002585059,0.005369425,0.00001895204,0.0000498625,0.001432739,0.00005989238,0.01459856,0.957537,0.0002544314,0.02028062,0.00007595848],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7785296,0.003478483,0.1861824,0.0005642535,0.0004249337,0.0001908696,0.001342249,0.005140645,0.02414659],"genre_scores_gemma":[0.8487506,0.00101748,0.1259018,0.0001427375,0.00005937502,0.0001374211,0.0007275838,0.0001928256,0.02307014],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002393805,"threshold_uncertainty_score":0.008008122,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003433431979822955,"score_gpt":0.1655289690346382,"score_spread":0.1620955370548152,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}