{"id":"W2018503557","doi":"10.1117/12.707943","title":"Sub-micron resolution three dimensional structure writing using two photon absorption process","year":2006,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Nonlinear Optical Materials Studies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Fabrication; Resist; Materials science; Absorption (acoustics); Photonics; Optics; Resolution (logic); Optoelectronics; Photonic crystal; Microstructure; Process (computing); High resolution; Photon; Nanotechnology; Composite material; Computer science; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008082955,0.0001911519,0.0001812039,0.0001305585,0.0001528884,0.0003787736,0.000280094,0.0002638497,0.0009920917],"category_scores_gemma":[0.0001586536,0.0001894594,0.0001324416,0.0001278575,0.0001890931,0.0002598691,0.0003491924,0.0004340231,0.000356938],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002372348,"about_ca_system_score_gemma":0.0002285387,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007509882,"about_ca_topic_score_gemma":0.001803642,"domain_scores_codex":[0.9999067,0.00000418242,0.000005477246,0.0000201569,0.00005060812,0.00001282955],"domain_scores_gemma":[0.9998395,0.0000374124,0.0000422976,0.00003528658,0.00003066005,0.00001476038],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000831696,0.000006526998,0.0001118109,0.00001760314,0.000001429965,0.00003685186,0.00001989998,0.0001910292,0.9967936,0.0002941065,0.00007948797,0.002439419],"study_design_scores_gemma":[0.00001166493,0.00005933151,0.001630449,0.000002807141,0.000004030293,0.0003139864,0.00002003591,0.009742234,0.9859852,0.000202691,0.002017881,0.000009768077],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9207553,0.0003917008,0.06988785,0.0001279,0.00004595167,0.00004640018,0.0003482497,0.0007420844,0.007654571],"genre_scores_gemma":[0.8964642,0.0002688114,0.0995881,0.00003970295,0.00000889036,0.00004113747,0.0002268944,0.00004021113,0.003322112],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009920917,"threshold_uncertainty_score":0.003318846,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0101599494577994,"score_gpt":0.2299276853387539,"score_spread":0.2197677358809544,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}