{"id":"W2018854595","doi":"10.1088/0960-1317/14/7/002","title":"Design and modeling of a MEMS bidirectional vertical thermal actuator","year":2004,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":96,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microelectromechanical systems; Actuator; Thermal; Mechanical engineering; Materials science; Engineering; Electrical engineering; Optoelectronics; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001267472,0.0001182135,0.0002158927,0.0001482565,0.00002390644,0.00001251956,0.00006729732,0.00007599871,0.000001521873],"category_scores_gemma":[0.00001761868,0.0001060089,0.00004034631,0.00007670953,0.0000155332,0.0001177669,0.00002867258,0.000198202,1.881047e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000381646,"about_ca_system_score_gemma":0.00001528716,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001328692,"about_ca_topic_score_gemma":2.4399e-7,"domain_scores_codex":[0.9994441,0.000001523227,0.0002632801,0.00006955519,0.00007068701,0.000150891],"domain_scores_gemma":[0.9997872,0.00002254927,0.0000317019,0.00005671863,0.00004579496,0.00005600198],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000103532,0.000008000161,3.335184e-7,0.000034764,0.00003660042,0.000007008088,0.00007578528,0.1847687,0.8129657,0.0001420155,0.000002409952,0.001948309],"study_design_scores_gemma":[0.0006181365,0.0001243276,0.000008133388,0.000165319,0.00002773499,0.0003913083,0.00008249956,0.08148774,0.9157295,0.001137586,0.00009297515,0.0001347722],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6386416,0.002645279,0.3585194,0.00001755131,0.0001103361,0.00003236888,8.799697e-7,0.00003035807,0.000002191268],"genre_scores_gemma":[0.9364571,0.002288769,0.0611938,0.00000447397,0.00003130713,9.811724e-7,1.412518e-7,0.00002234223,0.000001069797],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2978155,"threshold_uncertainty_score":0.4322919,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01239665823648434,"score_gpt":0.2014895376477631,"score_spread":0.1890928794112788,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}