{"id":"W2019019048","doi":"10.1149/1.1337607","title":"Characterization of Gd[sub 2]O[sub 3] Films Deposited on Si(100) by Electron-Beam Evaporation","year":2001,"lang":"en","type":"article","venue":"Journal of The Electrochemical Society","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":78,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University; University of Toronto; Institute for Microstructural Sciences","funders":"","keywords":"Materials science; Annealing (glass); Silicon; Amorphous solid; Analytical Chemistry (journal); Polycrystalline silicon; Transmission electron microscopy; Silicon oxide; Electron beam physical vapor deposition; Oxide; Dielectric; Chemical vapor deposition; Optoelectronics; Layer (electronics); Nanotechnology; Composite material; Chemistry; Crystallography; Thin-film transistor; Silicon nitride; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001590605,0.0001475396,0.0002423593,0.00002060213,0.00005019921,0.00003373778,0.0002137135,0.000145337,0.00001938937],"category_scores_gemma":[0.00002946503,0.0001066661,0.0002277801,0.0002448966,0.00002518257,0.0001580035,0.00001430211,0.0002953845,0.000002273575],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001250745,"about_ca_system_score_gemma":0.00002430257,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001323443,"about_ca_topic_score_gemma":3.454174e-7,"domain_scores_codex":[0.9989446,0.00002520501,0.0004257118,0.00009074208,0.0002882024,0.0002255705],"domain_scores_gemma":[0.9993709,0.00003783266,0.0002933368,0.000127377,0.000114144,0.00005641699],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004466048,0.00004847543,0.0001208735,0.00002403355,0.00008047256,2.474362e-7,0.00007597432,0.00002640994,0.9975199,0.000004697149,0.001985589,0.00006868663],"study_design_scores_gemma":[0.0002701039,0.0001065108,0.0004971009,0.00004583484,0.00004211122,0.00003165449,0.00001030168,0.0008512393,0.9975167,0.00005613585,0.0004624059,0.0001099018],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9983775,0.0002697157,0.0008158917,0.0001410796,0.0002290888,0.00008563742,0.000004784095,0.00003122635,0.00004508804],"genre_scores_gemma":[0.9988076,0.0005581197,0.00008802146,0.0002331149,0.0002470398,0.000002387608,0.00002598518,0.00002497981,0.00001273564],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001523183,"threshold_uncertainty_score":0.4349716,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005250907732483546,"score_gpt":0.1989792931733372,"score_spread":0.1937283854408536,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}