{"id":"W2020276185","doi":"10.1116/1.582271","title":"Mass-resolved ion energy distributions in continuous dual mode microwave/radio frequency plasmas in argon and nitrogen","year":2000,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":37,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Plasma; Atomic physics; Ion; Materials science; Radio frequency; Argon; Plasma diagnostics; Plasma parameters; Microwave; Ion source; Analytical Chemistry (journal); Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003135787,0.0001770141,0.0003264982,0.0006558335,0.0001389123,0.00006804899,0.0002928871,0.0002011942,0.00001004092],"category_scores_gemma":[0.00003830178,0.0001622956,0.00003504385,0.001194226,0.0004245169,0.0002943286,0.00004054348,0.0004054715,0.000002468321],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007558066,"about_ca_system_score_gemma":0.00007437423,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000496648,"about_ca_topic_score_gemma":0.0001576935,"domain_scores_codex":[0.9986852,0.00001379514,0.0004844074,0.0002339621,0.0001611029,0.0004214619],"domain_scores_gemma":[0.9994841,0.0000777376,0.00009682301,0.0001599006,0.00006341525,0.0001180122],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002746973,0.000169165,0.03337141,0.00001624505,0.00002700866,0.0001556737,0.0002277912,0.01776417,0.9293783,0.01315574,0.0001624397,0.00554461],"study_design_scores_gemma":[0.00322561,0.0005805658,0.02587186,0.0003609649,0.00007852423,0.001433351,0.001003539,0.2074562,0.6376566,0.1186366,0.002656991,0.001039136],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9962096,0.001559678,0.0009136298,0.0008248932,0.00007981528,0.00008761277,0.00007324,0.00004474046,0.0002067402],"genre_scores_gemma":[0.9923915,0.002955443,0.00458861,0.00001036601,0.00001320621,0.00001169164,0.000003287763,0.00001108201,0.00001476972],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2917216,"threshold_uncertainty_score":0.6618223,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00465323274802777,"score_gpt":0.2044855778485265,"score_spread":0.1998323451004987,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}