{"id":"W2020290531","doi":"10.1117/12.515063","title":"Development of a novel translation micromirror for adaptive optics","year":2003,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":32,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"CMC Microsystems","keywords":"Stiction; Surface micromachining; Translation (biology); Optics; Materials science; Adaptive optics; Deformable mirror; Microelectromechanical systems; Optoelectronics; Stroke (engine); Substrate (aquarium); Voltage; Computer science; Fabrication; Physics; Electrical engineering; Mechanical engineering; Engineering; Chemistry; Medicine","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003740227,0.000412126,0.0004704175,0.0001802059,0.0002803849,0.0003287738,0.0007774627,0.0007359192,0.0007032976],"category_scores_gemma":[0.0004931521,0.0003878795,0.000561955,0.0001278857,0.0002530931,0.0007288189,0.0004320284,0.0006916097,0.0004178048],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003219954,"about_ca_system_score_gemma":0.0006861224,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005139619,"about_ca_topic_score_gemma":0.0006411426,"domain_scores_codex":[0.9996581,0.00001648983,0.0000254962,0.00009085233,0.0001776878,0.00003142439],"domain_scores_gemma":[0.9997198,0.00005497066,0.00003890794,0.00003523148,0.0001182225,0.00003289834],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002698472,0.00001786119,0.0002208592,0.000114909,0.000009331852,0.0001728039,0.00005134751,0.000708389,0.9757476,0.002008668,0.0002864139,0.02063468],"study_design_scores_gemma":[0.00005243644,0.0006396052,0.001207647,0.00001846901,0.0000374899,0.002340215,0.00002934335,0.04444916,0.9263978,0.0003753034,0.02439951,0.00005295991],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2043894,0.002195949,0.7823064,0.0003860964,0.0007742521,0.0003612228,0.0001149522,0.002058112,0.007413575],"genre_scores_gemma":[0.2413136,0.0007300107,0.7526472,0.0001060803,0.00007198669,0.000109918,0.0001062716,0.00008653096,0.004828481],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0007774627,"threshold_uncertainty_score":0.002352774,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02514568884116636,"score_gpt":0.2396583742202595,"score_spread":0.2145126853790932,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}