{"id":"W2020403021","doi":"10.1063/1.1516243","title":"Spectroscopic photothermal radiometry as a deep subsurface depth profilometric technique in semiconductors","year":2003,"lang":"en","type":"article","venue":"Review of Scientific Instruments","topic":"Thermography and Photoacoustic Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Materials science; Penetration depth; Optics; Photothermal therapy; Radiometry; Semiconductor; Excitation; Wafer; Photothermal spectroscopy; Optoelectronics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006130321,0.000502707,0.0004615209,0.0006825787,0.0001586982,0.0008515847,0.0006117973,0.0006823438,0.0007762797],"category_scores_gemma":[0.0006515082,0.0004184713,0.0002210976,0.0007514642,0.0009054086,0.001016967,0.0003526486,0.000944094,0.0005013688],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004302416,"about_ca_system_score_gemma":0.0002917511,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002271397,"about_ca_topic_score_gemma":0.0004389462,"domain_scores_codex":[0.9996376,0.0001115008,0.00001269864,0.0000607316,0.0001570903,0.00002038577],"domain_scores_gemma":[0.9996637,0.0001766925,0.00004848665,0.00004604826,0.00005089428,0.00001412605],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006827126,0.00003052217,0.0007316036,0.0006485364,0.00001372476,0.0001801142,0.0001174204,0.004418199,0.859334,0.03051347,0.0004790484,0.1034651],"study_design_scores_gemma":[0.00002503292,0.0007441422,0.002493243,0.0001464064,0.00005112803,0.003265345,0.0002253324,0.06686243,0.8568224,0.02513883,0.04413398,0.00009167568],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.07621322,0.04899248,0.8625752,0.0007670065,0.0002166589,0.0001015704,0.0001425958,0.0009013276,0.01009001],"genre_scores_gemma":[0.5139042,0.03245056,0.4465777,0.0002360625,0.0001531079,0.0001335154,0.0001086087,0.00008403543,0.006352215],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0008515847,"threshold_uncertainty_score":0.003242075,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01092315857264065,"score_gpt":0.2503867680487007,"score_spread":0.23946360947606,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}