{"id":"W2020467181","doi":"10.1063/1.1650546","title":"Surface relaxation in ion-etch nanopatterning","year":2004,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Materials science; Etching (microfabrication); Scaling; Relaxation (psychology); Surface (topology); Ion; Silicon; Surface tension; Chemical physics; Nanotechnology; Chemistry; Optoelectronics; Geometry; Thermodynamics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004915763,0.0001255143,0.0001274621,0.00004418944,0.00004474528,0.00003323668,0.00008010811,0.00003431718,0.00001543018],"category_scores_gemma":[0.000001186707,0.0001410152,0.00004875719,0.0003052871,0.00001308001,0.0001320986,0.00001193226,0.0002015242,0.0001798446],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001577115,"about_ca_system_score_gemma":0.000005367039,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001041606,"about_ca_topic_score_gemma":0.00001731339,"domain_scores_codex":[0.9993762,0.000005446276,0.0001636134,0.0001486663,0.0001156761,0.000190369],"domain_scores_gemma":[0.9997584,0.00002215456,0.00003388265,0.0001515476,0.000008842713,0.00002515628],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000001071675,0.000009984081,0.00031011,0.000006463791,0.00001343217,0.0000017358,0.0002277173,0.5928392,0.4053402,0.0002937628,0.00009582577,0.0008605177],"study_design_scores_gemma":[0.002363428,0.0000204647,0.009650135,0.0002306578,0.00009068821,0.000005918325,0.0007473211,0.04451901,0.9362798,0.001874183,0.002691257,0.001527171],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9702275,0.00001063772,0.0276264,0.000311541,0.0001604539,0.00007038985,0.000001903788,0.0001249528,0.001466161],"genre_scores_gemma":[0.9987304,0.000009698512,0.0007977664,0.000289955,0.00009883448,0.00001138056,0.00002258945,0.00002984868,0.000009495201],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5483202,"threshold_uncertainty_score":0.5750435,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006493580310250907,"score_gpt":0.1987504593758274,"score_spread":0.1922568790655765,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}