{"id":"W2020526642","doi":"10.1016/j.mee.2012.03.002","title":"A new bimaterial microcantilever with tunable thermomechanical response","year":2012,"lang":"en","type":"article","venue":"Microelectronic Engineering","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"Ontario Centres of Excellence; CMC Microsystems","keywords":"Materials science; Finite element method; Capacitance; Thermal; Sensitivity (control systems); Composite material; Process (computing); Heating element; Mechanical engineering; Structural engineering; Electronic engineering; Computer science; Electrode","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003543407,0.0003689692,0.0005761182,0.0003419633,0.0003435953,0.0005723556,0.001210207,0.001378529,0.001729512],"category_scores_gemma":[0.0002824121,0.000328956,0.0001968981,0.0002451871,0.0003434717,0.0008048149,0.0006137313,0.0006968506,0.001097805],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003402242,"about_ca_system_score_gemma":0.000137919,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007363845,"about_ca_topic_score_gemma":0.0002251573,"domain_scores_codex":[0.9995147,0.00003803423,0.00002130008,0.0001817274,0.0001920588,0.00005212892],"domain_scores_gemma":[0.999765,0.00003554776,0.00004416201,0.00005758505,0.00003978068,0.0000579023],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002712296,0.00001569378,0.00005125818,0.00003309673,0.000004032629,0.00004709918,0.00001863684,0.00008091275,0.9931923,0.0007868839,0.0004259383,0.005317087],"study_design_scores_gemma":[0.0000233827,0.0002637933,0.0009473379,0.000006624904,0.00001970947,0.0006824069,0.00002185006,0.006369489,0.9748865,0.0003812221,0.0163674,0.00003028851],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7645958,0.007961353,0.1974052,0.002102148,0.001938567,0.0001614029,0.00060855,0.003665737,0.02156119],"genre_scores_gemma":[0.7669537,0.0008472026,0.2138638,0.001120391,0.0003062961,0.000127802,0.0003255843,0.0001882946,0.01626709],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001729512,"threshold_uncertainty_score":0.005785823,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002827556795862994,"score_gpt":0.1804629577819916,"score_spread":0.1776354009861286,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}