{"id":"W2020646746","doi":"10.1143/jjap.39.2189","title":"Measurement of Copper Drift in Methylsilsesquiazane-Methylsilsesquioxane Dielectric Films","year":2000,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Time-dependent gate oxide breakdown; Dielectric; Dielectric strength; Ion; Analytical Chemistry (journal); Leakage (economics); Capacitor; Electric field; Threshold voltage; Polyimide; Copper; Chemical vapor deposition; Stress (linguistics); Voltage; Optoelectronics; Gate dielectric; Composite material; Electrical engineering; Transistor; Metallurgy; Chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001619741,0.0002951622,0.0001616253,0.0002751109,0.0001838598,0.0002107347,0.0002409599,0.0002421266,0.0006263282],"category_scores_gemma":[0.0003668565,0.0001919048,0.00009391044,0.0002949211,0.0001774134,0.0002480723,0.0001385829,0.0002654643,0.0001067593],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003035922,"about_ca_system_score_gemma":0.0001320548,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008866616,"about_ca_topic_score_gemma":0.001459755,"domain_scores_codex":[0.9998797,0.00001061759,0.000008967286,0.00003522784,0.00004264651,0.00002285598],"domain_scores_gemma":[0.9996387,0.00006807742,0.0001313412,0.00002700856,0.00009675679,0.00003817432],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003197655,0.000003428966,0.0003142886,0.00001421301,0.000001865104,0.00002429377,0.00002689057,0.00002455176,0.9988793,0.00001042351,0.000005040287,0.0006636785],"study_design_scores_gemma":[0.000003574678,0.0001405514,0.004031476,0.000003595822,0.000004769663,0.00006008843,0.00003086925,0.0003542242,0.9951443,0.000008628938,0.0002154104,0.000002404713],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9986976,0.0002778748,0.0006895874,0.00001709903,0.000005606511,0.000004601782,0.00006673398,0.00001824621,0.0002225198],"genre_scores_gemma":[0.9972378,0.000368538,0.001531957,0.00001578922,0.000004066811,0.00001520959,0.00008843448,0.000007279456,0.0007309353],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008866616,"threshold_uncertainty_score":0.002202749,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01478967202494604,"score_gpt":0.2452956594595662,"score_spread":0.2305059874346202,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}