{"id":"W2020853633","doi":"10.1063/1.4872381","title":"An inverted cylindrical sputter magnetron as metal vapor supply for electron cyclotron resonance ion sources","year":2014,"lang":"en","type":"article","venue":"Review of Scientific Instruments","topic":"Particle accelerators and beam dynamics","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Freistaat Sachsen; European Commission; TRIUMF","keywords":"Electron cyclotron resonance; Cavity magnetron; Materials science; Sputter deposition; Atomic physics; Plasma; Langmuir probe; Electron temperature; Magnetic field; Plasma diagnostics; Optics; Sputtering; Physics; Thin film; Nanotechnology; Nuclear physics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002353747,0.0004490035,0.0005486275,0.0003467356,0.0002549537,0.0004712912,0.001280875,0.0005886576,0.001126507],"category_scores_gemma":[0.0004250746,0.0003208304,0.0003402272,0.0003261157,0.0002714606,0.0003986305,0.0003761117,0.0004616142,0.0007627764],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005308477,"about_ca_system_score_gemma":0.0004466714,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007278732,"about_ca_topic_score_gemma":0.001310583,"domain_scores_codex":[0.9995116,0.00002636909,0.00001708412,0.00008896089,0.0003143014,0.00004169493],"domain_scores_gemma":[0.9997801,0.00003365453,0.00003842383,0.0000312526,0.00009383576,0.00002280481],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005585991,0.000007542822,0.0002305381,0.0001846306,0.000007367902,0.0001122646,0.00002434421,0.0001580577,0.9829973,0.0009133393,0.00109467,0.01421403],"study_design_scores_gemma":[0.00003846432,0.0004036303,0.002949637,0.00002118169,0.00004680838,0.001602632,0.00003551877,0.007143874,0.930154,0.0002132185,0.05734641,0.00004463586],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4401563,0.02616289,0.4906994,0.001304045,0.001569427,0.0008756613,0.00207068,0.006627135,0.03053449],"genre_scores_gemma":[0.5919068,0.004367719,0.3911092,0.000269753,0.0001641227,0.0002647881,0.001010735,0.0002481133,0.01065876],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001280875,"threshold_uncertainty_score":0.003851652,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01019407028972247,"score_gpt":0.2495960805867836,"score_spread":0.2394020102970611,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}