{"id":"W2021559722","doi":"10.1088/0960-1317/16/12/015","title":"Design and characterization of a micromachined Fabry–Perot vibration sensor for high-temperature applications","year":2006,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":35,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"U.S. Air Force; National Aeronautics and Space Administration","keywords":"Fabry–Pérot interferometer; Characterization (materials science); Vibration; Materials science; Optoelectronics; Acoustics; Electronic engineering; Engineering; Physics; Nanotechnology; Wavelength","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006934303,0.0006479248,0.000962114,0.0004020718,0.0002627404,0.0006304633,0.00164624,0.000990591,0.0006161219],"category_scores_gemma":[0.001028868,0.0004447198,0.0002937459,0.0002804325,0.0004740999,0.000737773,0.0002503366,0.0005470977,0.0003724706],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007874022,"about_ca_system_score_gemma":0.0008803093,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001195231,"about_ca_topic_score_gemma":0.001740426,"domain_scores_codex":[0.9991849,0.00003812189,0.00004106148,0.0001969219,0.0004893639,0.00004968534],"domain_scores_gemma":[0.9993151,0.0001280774,0.0001780461,0.00007747408,0.000233171,0.00006804566],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003072402,0.00002209769,0.0002862806,0.0001000513,0.000007719654,0.00008366929,0.00002598557,0.001254617,0.9939824,0.0001561546,0.00009094523,0.003959386],"study_design_scores_gemma":[0.00004659896,0.0006570072,0.005232077,0.00001402973,0.00003001336,0.0004813981,0.0000246629,0.03864839,0.9511412,0.00008786874,0.003595283,0.00004137157],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6412467,0.002715272,0.3507953,0.000351833,0.0003316431,0.0008623112,0.0006844782,0.001153238,0.001859314],"genre_scores_gemma":[0.7185728,0.0005123024,0.2783719,0.0001116018,0.00005054093,0.0002818812,0.0003688143,0.00005565417,0.001674453],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00164624,"threshold_uncertainty_score":0.005713046,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003428127768150351,"score_gpt":0.1737267562283205,"score_spread":0.1702986284601702,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}