{"id":"W2021940171","doi":"10.1115/wtc2005-63280","title":"The Influence of Residual Stress on Micromachine Stiction of a Stiff Circular Plate","year":2005,"lang":"en","type":"article","venue":"World Tribology Congress III, Volume 1","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"","keywords":"Stiction; Materials science; Residual stress; Stiffness; Microelectromechanical systems; Composite material; Adhesion; Stress (linguistics); Membrane; Bending; Substrate (aquarium); Coupling (piping); Strain energy release rate; Structural engineering; Fracture mechanics; Nanotechnology; Chemistry; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002050474,0.0002605916,0.0002608071,0.0001818434,0.0001911258,0.0002297145,0.0002700615,0.0004132176,0.0005865375],"category_scores_gemma":[0.0008876324,0.0001207284,0.0001554693,0.0000681954,0.0006113243,0.0002075017,0.0002412004,0.0002770126,0.00009291395],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001410352,"about_ca_system_score_gemma":0.00009517147,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004379335,"about_ca_topic_score_gemma":0.0003748569,"domain_scores_codex":[0.9998749,0.00001867314,0.000004496419,0.00002075044,0.00004939087,0.00003177861],"domain_scores_gemma":[0.9994408,0.0003107495,0.00008672442,0.00005934628,0.0000598349,0.00004253553],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0004081994,0.00004207193,0.000828005,0.000106957,0.00002152015,0.0006829351,0.0001119029,0.02259475,0.9683002,0.0007338373,0.0001146023,0.00605522],"study_design_scores_gemma":[0.00004521527,0.001973294,0.01368367,0.00002168005,0.00005710624,0.0005579458,0.000108199,0.3583817,0.6237525,0.0007809493,0.0005887274,0.00004892347],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9954057,0.0003579595,0.003100256,0.00005314574,0.00001793416,0.000004952133,0.00002054178,0.00004241145,0.0009971404],"genre_scores_gemma":[0.9995077,0.00006770937,0.0002265335,0.000004766387,0.000005689639,0.000001303329,0.000007469011,0.00000467368,0.0001741688],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005865375,"threshold_uncertainty_score":0.001962185,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005763077658950683,"score_gpt":0.224680719199944,"score_spread":0.2189176415409933,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}