{"id":"W2022142028","doi":"10.1116/1.1577130","title":"Barium–strontium–titanate etching characteristics in chlorinated discharges","year":2003,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique; Université de Montréal","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies","keywords":"Analytical Chemistry (journal); Etching (microfabrication); Wafer; Chlorine; Chemistry; Strontium titanate; Inductively coupled plasma; Plasma; Reactive-ion etching; Barium; Titanate; Materials science; Inorganic chemistry; Thin film; Nanotechnology; Ceramic; Layer (electronics); Chromatography","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007099553,0.0001775322,0.0003374005,0.0007762279,0.0001716637,0.00009235849,0.0004291966,0.0001464751,0.00001342576],"category_scores_gemma":[0.0001729737,0.0001527541,0.00003958497,0.001363838,0.0002911661,0.0003914718,0.00005790437,0.0005521826,0.000005938556],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005380467,"about_ca_system_score_gemma":0.00008082001,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002474455,"about_ca_topic_score_gemma":0.000006278706,"domain_scores_codex":[0.9986552,0.00001173202,0.0004945095,0.0001977834,0.0002114367,0.000429362],"domain_scores_gemma":[0.9993261,0.0000698324,0.0001677686,0.000189597,0.0001255358,0.0001212125],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003151979,0.0004480444,0.1717814,0.0001205326,0.0001330187,0.0002653238,0.0008412324,0.009787367,0.6539427,0.1578556,0.000708801,0.004084422],"study_design_scores_gemma":[0.003917401,0.0009095144,0.3167543,0.0007851454,0.000203633,0.001715608,0.004724776,0.2308596,0.3714762,0.03306731,0.03324123,0.002345239],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9963601,0.0006858654,0.001118303,0.001002367,0.0003775522,0.00009237796,0.00001619928,0.0000650185,0.0002822666],"genre_scores_gemma":[0.9931745,0.001257574,0.005493203,0.00001688388,0.00001205791,0.000006306281,7.985281e-7,0.00001469162,0.00002400059],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2824665,"threshold_uncertainty_score":0.6229133,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004813555528553957,"score_gpt":0.2091385364536194,"score_spread":0.2043249809250654,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}