{"id":"W2022243882","doi":"10.1109/jmems.2015.2392692","title":"A 3-DOF MEMS Electrostatic Piston-Tube Actuator","year":2015,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Actuator; Microelectromechanical systems; Materials science; Piston (optics); Wafer; Stiffness; Fabrication; Pneumatic actuator; Mechanism (biology); Tube (container); Silicon on insulator; Translation (biology); Rotation (mathematics); Comb drive; Mechanical engineering; Optoelectronics; Optics; Composite material; Silicon; Electrical engineering; Physics; Engineering; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005429819,0.0002399534,0.0005949762,0.0002100823,0.00003678313,0.00005668338,0.0003959446,0.0001888092,0.000008247857],"category_scores_gemma":[0.0001905299,0.0001934504,0.0001524762,0.0003359955,0.0000296134,0.0002233749,0.00003108567,0.0006281537,0.00003214549],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005157428,"about_ca_system_score_gemma":0.0001050528,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000009123637,"about_ca_topic_score_gemma":0.000004764651,"domain_scores_codex":[0.9981846,0.00002152027,0.0007498887,0.0001416476,0.0003813504,0.0005210321],"domain_scores_gemma":[0.9989561,0.00008111716,0.0002478799,0.0002341301,0.0002164959,0.0002643202],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000432249,0.00003509712,0.000001457002,0.00004807557,0.0001044336,0.0000611416,0.00007177457,0.0002634883,0.9890496,0.001033279,0.007917889,0.001370505],"study_design_scores_gemma":[0.002425196,0.003012498,0.00001009133,0.000267082,0.0001037177,0.003904754,0.0009810826,0.001643479,0.8953512,0.008420642,0.08319917,0.0006810402],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.956317,0.007506663,0.0331091,0.0001920836,0.001666339,0.0002724091,0.000006222541,0.0003913391,0.0005388433],"genre_scores_gemma":[0.9968444,0.0004267396,0.002215755,0.00003233934,0.0002994681,0.000009762702,0.000001188947,0.00005912717,0.0001112153],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.09369838,"threshold_uncertainty_score":0.7888678,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01529951563051789,"score_gpt":0.2242545927925596,"score_spread":0.2089550771620417,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}