{"id":"W2022527931","doi":"10.1115/imece2006-15128","title":"Failure Mechanisms of MEMS Thermal Actuators","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Actuator; Microelectromechanical systems; Creep; Materials science; Thermal; Finite element method; Catastrophic failure; Stress (linguistics); Flexural strength; Structural engineering; Mechanical engineering; Electrical engineering; Engineering; Composite material; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004439204,0.0005762565,0.0003237009,0.0007816539,0.0004492572,0.0002891631,0.0007205015,0.000944346,0.001550387],"category_scores_gemma":[0.0006925057,0.0003823429,0.0004153253,0.0001696866,0.0006397185,0.0006474855,0.0002824223,0.0002512895,0.0003114627],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003383821,"about_ca_system_score_gemma":0.0001844042,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007826277,"about_ca_topic_score_gemma":0.0004743851,"domain_scores_codex":[0.999777,0.00002087996,0.00001460986,0.00004172183,0.0001168405,0.00002895604],"domain_scores_gemma":[0.9996363,0.0001363721,0.00007503662,0.00005199395,0.00008504004,0.00001514343],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004127788,0.0001195656,0.01705056,0.0006019162,0.0001316221,0.001560919,0.0005433192,0.2115423,0.7114683,0.01205696,0.001295766,0.04321599],"study_design_scores_gemma":[0.00002993186,0.0005385483,0.04564136,0.00008346901,0.00006822073,0.001608008,0.0001651358,0.7476994,0.1953588,0.005600297,0.003109206,0.00009766802],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9471592,0.004099899,0.04297778,0.0001650516,0.00005120906,0.00004948672,0.0001542729,0.0003973161,0.004945761],"genre_scores_gemma":[0.9962016,0.0005245714,0.001961444,0.00001238176,0.00001048449,0.00002968145,0.00005083714,0.0000126418,0.001196355],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001550387,"threshold_uncertainty_score":0.005186498,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003837304386752117,"score_gpt":0.1791051291104972,"score_spread":0.1752678247237451,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}