{"id":"W2022772238","doi":"10.1088/0960-1317/20/11/115038","title":"Optical interferometric displacement calibration and thermomechanical noise detection in bulk focused ion beam-fabricated nanoelectromechanical systems","year":2010,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":30,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta; National Institute for Nanotechnology","funders":"National Institutes of Natural Sciences","keywords":"Nanoelectromechanical systems; Materials science; Focused ion beam; Interferometry; Cantilever; Optics; Optoelectronics; Nanotechnology; Ion; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006341014,0.0002601829,0.0004701824,0.0004096081,0.00006380946,0.0001308176,0.0001699145,0.0001693881,0.00003377142],"category_scores_gemma":[0.00007329375,0.0002187598,0.0001060516,0.0004290909,0.00002062834,0.0001893147,0.0001197187,0.0008811511,0.000001528659],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005294482,"about_ca_system_score_gemma":0.00003270716,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002853742,"about_ca_topic_score_gemma":0.000004963735,"domain_scores_codex":[0.9983264,0.00003617305,0.0007328932,0.0002856965,0.000225415,0.0003934482],"domain_scores_gemma":[0.9990935,0.0001527378,0.0002104993,0.0001404713,0.00009452712,0.0003082076],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008501718,0.0001311112,0.00005184065,0.00003338186,0.00005220278,0.000008940539,0.00002675208,0.00003215464,0.9700609,0.01350263,0.000003629198,0.01601148],"study_design_scores_gemma":[0.002978303,0.001259891,0.0003873716,0.0002454038,0.0001431701,0.0003143333,0.0001231987,0.1471171,0.8432542,0.003075625,0.0005046451,0.0005967089],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8364091,0.0003158742,0.1624377,0.00008553488,0.0005277448,0.0001927535,0.000006419497,0.00001386379,0.00001104827],"genre_scores_gemma":[0.9987553,0.0000623867,0.0009119887,0.00001419315,0.0001935913,0.0000101055,0.000003395417,0.00003353944,0.00001543909],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1623463,"threshold_uncertainty_score":0.8920767,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004220383526976237,"score_gpt":0.1936785407485819,"score_spread":0.1894581572216056,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}