{"id":"W2023423552","doi":"10.1007/s00542-014-2347-9","title":"Design and fabrication of a square shape bulk mode MEMS resonators","year":2014,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Alberta","funders":"University of Alberta","keywords":"Fabrication; Resonator; Microelectromechanical systems; Square (algebra); Mode (computer interface); Materials science; Mechanical engineering; Engineering; Computer science; Optoelectronics; Mathematics; Geometry; Human–computer interaction","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001579386,0.0001826105,0.0002892188,0.0002216878,0.00004940062,0.00001839773,0.0002951245,0.0003210386,0.000001353901],"category_scores_gemma":[0.0001726629,0.0001621251,0.00003103564,0.0002707201,0.0001517674,0.0001019191,0.0001115491,0.0001755304,0.00000604232],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004632205,"about_ca_system_score_gemma":0.000005138437,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000008951083,"about_ca_topic_score_gemma":0.000004953684,"domain_scores_codex":[0.9991644,0.00000575121,0.0002735952,0.0002275001,0.00009959077,0.0002291784],"domain_scores_gemma":[0.9992903,0.0001090105,0.00007886229,0.0004464434,0.00006121473,0.00001412274],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006285824,0.000009221029,0.0001047423,0.0003870026,0.0000268112,9.838054e-7,0.00009509857,0.001980506,0.9202299,0.002902297,0.000324678,0.07393254],"study_design_scores_gemma":[0.0001956213,0.00008160163,0.00008669272,0.0001696274,0.00001012855,0.00001112391,0.0008247003,0.01344342,0.9735236,0.007311647,0.004119982,0.0002218921],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8490804,0.004511999,0.1398238,0.0001011244,0.000110912,0.0003893876,0.000009804286,0.005814071,0.0001585064],"genre_scores_gemma":[0.9732662,0.0006485261,0.02596548,0.000002435448,0.000006922641,0.00005973232,0.000001914911,0.00002950582,0.0000192951],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1241858,"threshold_uncertainty_score":0.6611272,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01032301170167661,"score_gpt":0.2157860569540415,"score_spread":0.2054630452523649,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}