{"id":"W2023748087","doi":"10.1117/12.585325","title":"RF MEMS devices for communication systems","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Variable capacitor; Capacitor; Inductor; Actuator; Electrical engineering; Electronic engineering; Materials science; Engineering; Optoelectronics; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005152178,0.0009635859,0.0005365622,0.0009125802,0.0007153906,0.001705365,0.0008468715,0.001652186,0.07244448],"category_scores_gemma":[0.0007936565,0.0002140961,0.0003002102,0.0009666497,0.0006306265,0.00172107,0.00157819,0.002036687,0.05355081],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005398431,"about_ca_system_score_gemma":0.0004136378,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002552621,"about_ca_topic_score_gemma":0.0003558832,"domain_scores_codex":[0.9994081,0.00007944938,0.00003024804,0.00009426914,0.0003350953,0.00005279116],"domain_scores_gemma":[0.9997274,0.00004197254,0.00002739731,0.00006691119,0.0001106678,0.00002559493],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005599971,0.00005470915,0.000267803,0.001063993,0.00003990213,0.0003268561,0.0001677309,0.0004382116,0.02655219,0.2448237,0.3027734,0.4234355],"study_design_scores_gemma":[0.000005466378,0.00002186449,0.0001000168,0.0001150472,0.000005417392,0.0002137945,0.00001529144,0.0001891026,0.001907853,0.008423522,0.988996,0.000006580117],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.00439349,0.2194539,0.06227362,0.01347973,0.02116593,0.0003519124,0.001728038,0.003030124,0.6741233],"genre_scores_gemma":[0.0666876,0.1414684,0.08045422,0.008128841,0.009936937,0.0006590055,0.002442622,0.000659479,0.6895629],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.07244448,"threshold_uncertainty_score":0.2423509,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0131714934365348,"score_gpt":0.2345127524227809,"score_spread":0.2213412589862462,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}