{"id":"W2024377202","doi":"10.1364/josab.29.000a55","title":"Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities","year":2012,"lang":"en","type":"article","venue":"Journal of the Optical Society of America B","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Air Force Office of Scientific Research; Division of Electrical, Communications and Cyber Systems; Academy of Finland; Achievement Rewards for College Scientists Foundation; California Institute of Technology; National Defense Science and Engineering Graduate; Tekniikan Edistämissäätiö; U.S. Department of Defense; University of Alberta; National Science Foundation","keywords":"Silicon; Deposition (geology); Materials science; Fabrication; Atomic layer deposition; Layer (electronics); Wavelength; Optoelectronics; Quality (philosophy); Q factor; Nanotechnology; Physics; Resonator","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004927487,0.0005352099,0.0004188456,0.0002727828,0.0003164251,0.0005476502,0.0002911965,0.0003501955,0.001819567],"category_scores_gemma":[0.001650259,0.0005825034,0.0002895319,0.0002616474,0.0003793746,0.0005120211,0.0002740076,0.0004000321,0.0003173702],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005411575,"about_ca_system_score_gemma":0.000275398,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002147698,"about_ca_topic_score_gemma":0.002822148,"domain_scores_codex":[0.9997,0.00003547508,0.0000323746,0.00006780298,0.0001113609,0.00005308231],"domain_scores_gemma":[0.9985902,0.0007894379,0.0002783706,0.0001089971,0.0001856764,0.00004732252],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008568967,0.00001476055,0.0004361238,0.0001071945,0.00002021382,0.00009859857,0.00004028223,0.0003733669,0.9976246,0.00004829619,0.00004776904,0.001102999],"study_design_scores_gemma":[0.0000177481,0.00009920575,0.002041022,0.000008463514,0.00001627059,0.00005773484,0.00002156704,0.001090686,0.9960659,0.00001655057,0.0005581423,0.000006734324],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9911932,0.003059267,0.003336674,0.0001626142,0.00007371472,0.00003755305,0.0002635979,0.0001302695,0.001742978],"genre_scores_gemma":[0.993729,0.001481371,0.003623278,0.00007214165,0.00001718037,0.00002211054,0.0001112648,0.00007068575,0.0008731135],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002147698,"threshold_uncertainty_score":0.006087124,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01318395771075393,"score_gpt":0.2669016731025212,"score_spread":0.2537177153917672,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}