{"id":"W2024893645","doi":"10.1021/cm000522d","title":"Spectroscopic Investigation of the Synthesis of Thin Silicon Nitride Films on Silicon Single-Crystal Wafers via Ammonia-Assisted Pyrolysis of Organosilicon Polymers","year":2001,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Advanced ceramic materials synthesis","field":"Materials Science","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University; Bishop's University","funders":"","keywords":"Organosilicon; Dimethylsilane; Pyrolysis; Materials science; Silicon; Chemical engineering; Wafer; Ammonia; Carbon fibers; Organic chemistry; Polymer chemistry; Chemistry; Nanotechnology; Composite material; Composite number","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008483425,0.0003020205,0.000153075,0.0001785496,0.0001383164,0.0001234699,0.0002303213,0.0001697863,0.001334944],"category_scores_gemma":[0.00013066,0.0002253203,0.0001455876,0.0001070337,0.0001201587,0.0001480914,0.0001037079,0.0003362382,0.0002834779],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001462419,"about_ca_system_score_gemma":0.0001409672,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005059234,"about_ca_topic_score_gemma":0.0009929385,"domain_scores_codex":[0.9999443,0.000004138677,0.000002286536,0.00001042414,0.00002910039,0.000009791816],"domain_scores_gemma":[0.9998829,0.000037177,0.00002615349,0.00001106424,0.00002791448,0.00001482961],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007219525,0.00000227122,0.00003928957,0.00001008645,0.000001478805,0.00001417333,0.000003711706,0.00002553826,0.9996929,0.000009601943,0.000004787673,0.0001889399],"study_design_scores_gemma":[0.000003788335,0.00006689647,0.002489465,0.00000238194,0.000003582519,0.00005878514,0.0000109132,0.0005101201,0.9965172,0.00001170422,0.000322987,0.000002129054],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9935271,0.0003972233,0.003204833,0.00002642699,0.00001195604,0.00002512743,0.0002981671,0.00005601298,0.002453166],"genre_scores_gemma":[0.9846724,0.0006759648,0.01113996,0.00002895972,0.000008760758,0.00004771928,0.0007199232,0.00004563052,0.0026606],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001334944,"threshold_uncertainty_score":0.004465818,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01322220220019853,"score_gpt":0.2184438193322157,"score_spread":0.2052216171320171,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}