{"id":"W2026005718","doi":"10.1021/cm020236x","title":"Economical Sputtering System To Produce Large-Size Composition-Spread Libraries Having Linear and Orthogonal Stoichiometry Variations","year":2002,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":165,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalhousie University","funders":"","keywords":"Wafer; Sputtering; Stoichiometry; Rotation (mathematics); Perpendicular; Ternary operation; Substrate (aquarium); Materials science; Deposition (geology); Phase (matter); Computer science; Nanotechnology; Thin film; Geometry; Chemistry; Mathematics; Artificial intelligence","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007573838,0.0006314983,0.0006649813,0.001321411,0.0006482095,0.0005943839,0.000843743,0.0003470707,0.004492173],"category_scores_gemma":[0.0006582327,0.0005273555,0.0003880204,0.0008335309,0.0003369697,0.0004437812,0.0006509263,0.0009261029,0.002426097],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004541366,"about_ca_system_score_gemma":0.0004243819,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003736323,"about_ca_topic_score_gemma":0.001568529,"domain_scores_codex":[0.9991019,0.0001281014,0.00007599409,0.0001994577,0.0004153224,0.0000793488],"domain_scores_gemma":[0.9995188,0.000114647,0.00005727646,0.0001906748,0.00007318689,0.00004542254],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005495868,0.00004482633,0.000202455,0.00006070013,0.0000201707,0.00003207917,0.00001709587,0.0002336899,0.9853885,0.0007104722,0.0004921652,0.01274288],"study_design_scores_gemma":[0.00005750697,0.0002872331,0.001225637,0.000005241438,0.00006225766,0.0005534599,0.00001294517,0.003008392,0.9807984,0.0001861049,0.01378411,0.00001867719],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3022144,0.001742655,0.6730087,0.0004137925,0.0002201334,0.001993892,0.001489074,0.005913226,0.01300407],"genre_scores_gemma":[0.4609481,0.00127999,0.5236083,0.0002350344,0.00009848714,0.001640491,0.00216963,0.0008513192,0.009168623],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004492173,"threshold_uncertainty_score":0.01502776,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01157251315988331,"score_gpt":0.1980931704067379,"score_spread":0.1865206572468545,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}