{"id":"W2026111217","doi":"10.1016/j.tsf.2004.03.043","title":"Quaternary hard nanocomposite TiCxNy/SiCN coatings prepared by plasma enhanced chemical vapor deposition","year":2004,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":48,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal; Regroupement Québécois sur les Matériaux de Pointe","funders":"","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Nanocomposite; Elastic recoil detection; X-ray photoelectron spectroscopy; Chemical vapor deposition; Composite material; Tin; Microstructure; Thin film; Nanotechnology; Chemical engineering; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000147705,0.0002940965,0.0003223295,0.00004375885,0.00008412169,0.00006608079,0.0002785487,0.0002079653,0.0001203803],"category_scores_gemma":[0.00001519363,0.0002959024,0.0001138531,0.0001349557,0.00003020264,0.0002145921,0.00007416133,0.0003043429,0.0003867412],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009799253,"about_ca_system_score_gemma":0.00001888261,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00005564643,"about_ca_topic_score_gemma":0.000002719807,"domain_scores_codex":[0.9985299,0.00001852907,0.0004113831,0.0003199742,0.0003049315,0.0004152932],"domain_scores_gemma":[0.9993947,0.00001501224,0.00007650403,0.0003108731,0.00003813499,0.0001647888],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000330212,0.00005931241,0.000003180674,0.0000785779,0.0000469251,0.00001699065,0.0009093533,0.002928727,0.9909585,0.0002870561,0.004343824,0.0003345972],"study_design_scores_gemma":[0.0007802383,0.00006907171,0.000005688981,0.000109326,0.00003362679,0.00004723403,0.00002939803,0.05968464,0.9375834,0.001023519,0.0002906582,0.0003431549],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9760926,0.0001534891,0.01770757,0.00006154992,0.001279677,0.0003066734,0.00005013918,0.000824168,0.003524125],"genre_scores_gemma":[0.9853463,0.00003640101,0.01314616,0.000149593,0.0001051283,0.00006186531,0.0002030022,0.00007216992,0.0008794178],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05675592,"threshold_uncertainty_score":0.9999493,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008008555083770052,"score_gpt":0.2103482278354779,"score_spread":0.2023396727517078,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}