{"id":"W2026748748","doi":"10.1007/s11082-012-9563-2","title":"Single etch grating couplers for mass fabrication with DUV lithography","year":2012,"lang":"en","type":"article","venue":"Optical and Quantum Electronics","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":27,"is_retracted":false,"has_abstract":false,"ca_institutions":"National Research Council Canada; Institute for Microstructural Sciences","funders":"","keywords":"Grating; Materials science; Lithography; Fabrication; Planar; Photolithography; Optics; Optoelectronics; Silicon on insulator; Coupling (piping); Waveguide; Electron-beam lithography; Nanoimprint lithography; Diffraction grating; Etching (microfabrication); Silicon; Resist; Nanotechnology; Computer science; Physics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003969545,0.0006107925,0.0005981318,0.0005290842,0.0004466531,0.0005493849,0.0006036265,0.0005225323,0.003087284],"category_scores_gemma":[0.0004322901,0.0007114371,0.0002630033,0.0003619576,0.0003346213,0.0006035552,0.0004308007,0.0005894408,0.001669197],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004563785,"about_ca_system_score_gemma":0.0002859519,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004646615,"about_ca_topic_score_gemma":0.001910552,"domain_scores_codex":[0.9996692,0.00003109146,0.00001820126,0.00008459858,0.0001583726,0.000038496],"domain_scores_gemma":[0.9996819,0.00007637645,0.00007609502,0.0001008781,0.00004378099,0.00002088914],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000237075,0.00002087854,0.00015906,0.00005322363,0.000008182926,0.00003291997,0.00003875108,0.0001697338,0.9915143,0.001132763,0.0003717728,0.006474623],"study_design_scores_gemma":[0.00000883939,0.0001085326,0.0007856247,0.00000589599,0.000008552434,0.0001000081,0.00001641566,0.002268406,0.9922813,0.0001860144,0.004222233,0.000008185288],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8314545,0.004353135,0.13193,0.0005126153,0.0003782359,0.0005302308,0.001327878,0.002985379,0.02652805],"genre_scores_gemma":[0.8340663,0.001323199,0.1496011,0.000105324,0.00008240117,0.0002821962,0.0004633942,0.0002926179,0.01378349],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003087284,"threshold_uncertainty_score":0.01032799,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01002829743379039,"score_gpt":0.2090043734870723,"score_spread":0.1989760760532819,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}