{"id":"W2026827309","doi":"10.1007/s00339-008-4938-8","title":"High repetition rate femtosecond laser nano-machining of thin films","year":2008,"lang":"en","type":"article","venue":"Applied Physics A","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":78,"is_retracted":false,"has_abstract":false,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Materials science; Laser; Surface micromachining; Femtosecond; Fluence; Wafer; Optics; Machining; Optoelectronics; Microelectromechanical systems; Laser beam machining; Fabrication; Laser beams","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000135355,0.0001454133,0.0002671793,0.0002073737,0.0002839897,0.0003104708,0.0003510258,0.0002848969,0.001502574],"category_scores_gemma":[0.0003134745,0.0002662409,0.00009938483,0.0001489208,0.0002143514,0.0004577597,0.0001709106,0.0003473521,0.0002365389],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003276724,"about_ca_system_score_gemma":0.0002245129,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007578546,"about_ca_topic_score_gemma":0.001329997,"domain_scores_codex":[0.9999015,0.000006512103,0.000006354447,0.00001680637,0.00005625437,0.000012575],"domain_scores_gemma":[0.9998584,0.00004815574,0.00002504463,0.00002840625,0.00003033763,0.000009643049],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003095647,0.0000073851,0.00007356045,0.00004082512,0.000002769259,0.00003821715,0.00003770036,0.0002581271,0.9967967,0.0002556322,0.0001282545,0.002329806],"study_design_scores_gemma":[0.00001137347,0.00006967934,0.001523971,0.000004938223,0.000004164473,0.000106022,0.00002950735,0.005157681,0.9913695,0.00009416616,0.001624651,0.000004379156],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9857337,0.001468654,0.005912527,0.0001588352,0.00007825671,0.00002175798,0.00008385973,0.0002126047,0.006329785],"genre_scores_gemma":[0.9859065,0.0003981775,0.008672824,0.00002712652,0.00001727492,0.00001367036,0.00007187226,0.00004827342,0.004844267],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001502574,"threshold_uncertainty_score":0.005026639,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00938544497842713,"score_gpt":0.1917426636044008,"score_spread":0.1823572186259736,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}