{"id":"W2026965105","doi":"10.1007/s11071-009-9603-z","title":"Modeling and analysis of electrostatic MEMS filters","year":2009,"lang":"en","type":"article","venue":"Nonlinear Dynamics","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":38,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Resonator; Filter (signal processing); Control theory (sociology); Mechanical filter; Boundary value problem; Voltage; Microelectromechanical systems; Physics; Eigenvalues and eigenvectors; Prototype filter; Microbeam; Filter design; Topology (electrical circuits); Acoustics; Mathematics; Mathematical analysis; Optics; Engineering; Computer science; Optoelectronics; Quantum mechanics; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00002993301,0.00007889995,0.000180774,0.0001771232,0.00001542834,0.000005910722,0.0000586047,0.00005310345,0.000001645787],"category_scores_gemma":[0.00001402331,0.00007698178,0.00004151375,0.0003714273,0.00001701821,0.00004954564,0.000008431203,0.0000922069,3.124397e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002831523,"about_ca_system_score_gemma":0.000003265486,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000005997117,"about_ca_topic_score_gemma":0.00006613714,"domain_scores_codex":[0.999594,8.452643e-7,0.0001349665,0.00008523002,0.00005766875,0.0001272505],"domain_scores_gemma":[0.9998009,0.00001311153,0.00001456611,0.0001327484,0.00001853825,0.00002017934],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000003882485,0.00001212483,0.00008825173,0.00001512594,0.0001513215,0.000001719434,0.00005904947,0.9252517,0.03576522,0.0004927541,0.000002666821,0.03815615],"study_design_scores_gemma":[0.00006467005,0.00003250516,0.0002092351,0.000005756831,0.0001044795,7.110614e-7,0.00005140904,0.9964917,0.00220625,0.0007421785,0.00001200429,0.00007912143],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8678529,0.0001996543,0.1315225,0.00003125811,0.00001756811,0.00003388578,0.00002111847,0.0001742008,0.0001468993],"genre_scores_gemma":[0.9582376,0.0005263294,0.04114795,0.00001601243,0.000006431351,9.365781e-7,0.00004167421,0.000009222123,0.00001379354],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.09038476,"threshold_uncertainty_score":0.3139226,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005827841699776968,"score_gpt":0.2272116978348934,"score_spread":0.2213838561351164,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}