{"id":"W2027247852","doi":"10.1002/mame.200900340","title":"Fabrication of Photonic/Microfluidic Integrated Devices Using an Epoxy Photoresist","year":2010,"lang":"en","type":"article","venue":"Macromolecular Materials and Engineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences; McMaster University","funders":"","keywords":"Photoresist; Materials science; Epoxy; Microfluidics; Fabrication; Layer (electronics); Photonics; Nanotechnology; Polymer; Optoelectronics; Nanoscopic scale; Photolithography; Waveguide; Lithography; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001790792,0.0001737095,0.0002138482,0.0001732667,0.00003324739,0.00007013937,0.0001248098,0.000108359,0.00006596552],"category_scores_gemma":[0.00001565688,0.0001779336,0.00003467438,0.0002063361,0.00003199864,0.0001265807,0.00002100017,0.00009550792,9.065816e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001178715,"about_ca_system_score_gemma":0.000008846594,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001185557,"about_ca_topic_score_gemma":0.000003117857,"domain_scores_codex":[0.9992841,0.00001541432,0.0002797953,0.0001615038,0.00008359677,0.0001756077],"domain_scores_gemma":[0.9995722,0.000009128189,0.00004567835,0.0002385556,0.00005947418,0.00007493684],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002397139,0.00001313173,0.0001026907,0.0001295804,0.00001989131,0.000002171903,0.00005937803,0.00008257108,0.9989406,0.0002522016,0.00001264827,0.0003826742],"study_design_scores_gemma":[0.00009717025,0.00001646315,0.002431971,0.00003816731,0.00002044851,0.00001932351,0.00001315043,0.005682938,0.9887503,0.00002154658,0.002712364,0.0001961838],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9738227,0.0005348563,0.02475219,0.000002733578,0.0002939597,0.0001452057,0.00003037464,0.0003594139,0.00005856505],"genre_scores_gemma":[0.9851905,0.0001167046,0.01454388,0.000009981606,0.00003762466,0.00001905231,0.0000344999,0.00004610588,0.000001706543],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01136775,"threshold_uncertainty_score":0.7255923,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006422155652962473,"score_gpt":0.2101362556310968,"score_spread":0.2037140999781343,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}