{"id":"W2027396056","doi":"10.1116/1.3553209","title":"Spectroscopic ellipsometry on thin titanium oxide layers grown on titanium by plasma oxidation","year":2011,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"ZnO doping and properties","field":"Materials Science","cited_by":29,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Titanium; Chemical-mechanical planarization; Materials science; X-ray photoelectron spectroscopy; Oxide; Titanium oxide; Thin film; Ellipsometry; Analytical Chemistry (journal); Plasma; Stoichiometry; Chemical engineering; Composite material; Nanotechnology; Metallurgy; Chemistry; Polishing","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.002712158,0.0003428939,0.0005178033,0.001221251,0.0006936097,0.000185438,0.0007480334,0.0003784869,0.0000453531],"category_scores_gemma":[0.0001681242,0.0002645589,0.00003296723,0.0007930616,0.001277624,0.0004814361,0.0001342657,0.000534187,0.00002282889],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003187411,"about_ca_system_score_gemma":0.0003900956,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000008546928,"about_ca_topic_score_gemma":0.000003974678,"domain_scores_codex":[0.9974111,0.00007307791,0.0006487592,0.0005657795,0.0005353324,0.0007659463],"domain_scores_gemma":[0.9985521,0.00002083478,0.0006986388,0.0002939421,0.0003384086,0.0000961029],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000306532,0.0001374549,0.00006934191,0.00005147152,0.00001810474,0.000005021089,0.0001788463,0.000002738167,0.9920745,0.004412775,0.00008298464,0.002660269],"study_design_scores_gemma":[0.000647813,0.002337134,0.00006594006,0.0002437205,0.00004662368,0.0001256114,0.00026206,0.00001971142,0.986232,0.008950124,0.0007926359,0.0002765588],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9933876,0.00357205,0.0007697557,0.001256073,0.0004491146,0.0001917357,0.000004276956,0.0001540607,0.000215345],"genre_scores_gemma":[0.9964225,0.000952039,0.002322923,0.0001695922,0.00004962912,0.00001087124,7.20024e-7,0.00002416743,0.00004751678],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.005842393,"threshold_uncertainty_score":0.9999807,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02134463791067975,"score_gpt":0.2207121611946517,"score_spread":0.1993675232839719,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}