{"id":"W2027396056","doi":"10.1116/1.3553209","title":"Spectroscopic ellipsometry on thin titanium oxide layers grown on titanium by plasma oxidation","year":2011,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"ZnO doping and properties","field":"Materials Science","cited_by":29,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Titanium; Chemical-mechanical planarization; Materials science; X-ray photoelectron spectroscopy; Oxide; Titanium oxide; Thin film; Ellipsometry; Analytical Chemistry (journal); Plasma; Stoichiometry; Chemical engineering; Composite material; Nanotechnology; Metallurgy; Chemistry; Polishing","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002745916,0.0004701436,0.0002764298,0.0005256465,0.0002296415,0.0002834226,0.000590595,0.0003781295,0.0007659193],"category_scores_gemma":[0.0007902673,0.0002670489,0.0002615302,0.0004779031,0.0002047733,0.0003310898,0.0003138165,0.0004276333,0.0002063882],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003959466,"about_ca_system_score_gemma":0.0001561064,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00168915,"about_ca_topic_score_gemma":0.001890718,"domain_scores_codex":[0.9997423,0.00002260783,0.00001087254,0.00004198329,0.0001539902,0.00002821688],"domain_scores_gemma":[0.999678,0.0001065826,0.00005855248,0.00003719697,0.0001048561,0.00001486647],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002666192,0.000006108061,0.000154842,0.00002627838,0.000003050321,0.00001620985,0.00003402141,0.00012908,0.9976704,0.00006589067,0.00002367542,0.001843762],"study_design_scores_gemma":[0.000005747214,0.00005405616,0.001819253,0.000005055538,0.00001182218,0.00006630423,0.00003379611,0.003779887,0.9934812,0.00004037076,0.000694211,0.000008337342],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9691073,0.001032892,0.0268278,0.00006913965,0.00005588099,0.00003960017,0.0002902832,0.0001571759,0.002419959],"genre_scores_gemma":[0.9721152,0.001070686,0.02499881,0.00002580148,0.000009846078,0.00002462725,0.0002644593,0.00003175574,0.001458774],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00168915,"threshold_uncertainty_score":0.003358603,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02134463791067975,"score_gpt":0.2207121611946517,"score_spread":0.1993675232839719,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}