{"id":"W2027739570","doi":"10.1063/1.3072698","title":"Physical and optoelectronic characterization of reactively sputtered molybdenum-silicon-nitride alloy metal gate electrodes","year":2009,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Manitoba","funders":"","keywords":"Work function; Materials science; X-ray photoelectron spectroscopy; Metal gate; Analytical Chemistry (journal); Silicon nitride; Gate dielectric; Sheet resistance; Nitride; Silicon; Optoelectronics; Tantalum nitride; Nitrogen; Transistor; Gate oxide; Nanotechnology; Voltage; Chemistry; Thin film; Electrical engineering; Layer (electronics); Nuclear magnetic resonance","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008881178,0.0001558258,0.0003944343,0.00005428416,0.00002056062,0.00003264962,0.000103195,0.00004396513,0.000004904435],"category_scores_gemma":[0.000003140861,0.0001388689,0.00007480486,0.0001216217,0.00002257911,0.0002441961,0.000008495813,0.0001687896,0.000001640791],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003312334,"about_ca_system_score_gemma":0.00002386522,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001116442,"about_ca_topic_score_gemma":1.141946e-7,"domain_scores_codex":[0.9992422,0.00001081304,0.0003061706,0.00009233113,0.0001692221,0.0001792228],"domain_scores_gemma":[0.9995155,0.00002537851,0.000251803,0.00009050129,0.00006367482,0.00005318098],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008724325,0.00005930357,0.000005885326,0.00002900674,0.00009244694,0.00000120044,0.0002592304,0.001131533,0.9951159,0.0009751696,0.000007255784,0.002235834],"study_design_scores_gemma":[0.0003930866,0.0001526883,0.002486956,0.00002107489,0.00007054379,0.00001283834,0.0000176983,0.001728961,0.991614,0.0033288,0.00004532193,0.0001280263],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9992567,0.00007445653,0.0002241963,0.00001010197,0.00007086787,0.00007721192,0.000006841822,0.00002427198,0.0002552985],"genre_scores_gemma":[0.9991953,0.0001343917,0.0001031625,0.00003896475,0.0004968206,0.000001362383,0.000007710268,0.00002047291,0.000001837541],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003501887,"threshold_uncertainty_score":0.566291,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007337231867105973,"score_gpt":0.2114050795016819,"score_spread":0.2040678476345759,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}