{"id":"W2028365438","doi":"10.1116/1.4873700","title":"Electrochemical etching technique: Conical-long-sharp tungsten tips for nanoapplications","year":2014,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Etching (microfabrication); Materials science; Conical surface; Cathode; Tungsten; Reactive-ion etching; Optoelectronics; Dry etching; Radius of curvature; Microelectromechanical systems; Isotropic etching; Optics; Nanotechnology; Curvature; Composite material; Electrical engineering; Metallurgy; Geometry; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.002187726,0.0002827517,0.0005061486,0.0006653076,0.0008182569,0.0001601356,0.0007046978,0.0002669475,0.000009691706],"category_scores_gemma":[0.0000656151,0.0002460508,0.00005775752,0.0007715584,0.001086078,0.0002510757,0.0001790746,0.0004823174,8.892684e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001337263,"about_ca_system_score_gemma":0.0004186307,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002676795,"about_ca_topic_score_gemma":0.000001151035,"domain_scores_codex":[0.9979037,0.00002560288,0.0006756541,0.0004882253,0.0002262423,0.0006805689],"domain_scores_gemma":[0.9982639,0.00003243535,0.0006933544,0.0002988642,0.0006165652,0.00009486399],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003241624,0.00008096079,0.000130886,0.00004101836,0.00002512047,1.021249e-7,0.00002945315,1.844617e-7,0.9153689,0.05620567,0.00003185044,0.0280534],"study_design_scores_gemma":[0.000522631,0.0004517386,0.00001383263,0.0001061201,0.00008136682,0.00009541324,0.00005431292,0.00004643516,0.8926254,0.09761184,0.008155668,0.0002352814],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3819713,0.001965873,0.6121814,0.002868768,0.00005548535,0.0007162737,0.000008815592,0.0001480966,0.00008394725],"genre_scores_gemma":[0.9782199,0.0001342441,0.02119147,0.00006767477,0.00009486954,0.0002405075,0.000004401089,0.00002648353,0.00002045466],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.5962486,"threshold_uncertainty_score":0.9999992,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009392843170065003,"score_gpt":0.2601604944205382,"score_spread":0.2507676512504732,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}