{"id":"W2030381120","doi":"10.1016/j.jnoncrysol.2012.08.015","title":"High quality amorphous–crystalline silicon heterostructure prepared by grid-biased remote radio-frequency plasma enhanced chemical vapor deposition","year":2012,"lang":"en","type":"article","venue":"Journal of Non-Crystalline Solids","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada; University of Toronto; Ontario Research Foundation","keywords":"Plasma-enhanced chemical vapor deposition; Materials science; Amorphous silicon; Heterojunction; Chemical vapor deposition; Optoelectronics; Amorphous solid; Silicon; Radio frequency; Wafer; Crystalline silicon; Carrier lifetime; Plasma; Chemistry; Telecommunications; Computer science; Crystallography","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009304517,0.000128402,0.0002133643,0.0001625235,0.0001688339,0.0003092958,0.0002309643,0.00017806,0.0006416454],"category_scores_gemma":[0.0001152564,0.0001770047,0.00008125429,0.0001717662,0.0001803089,0.00014874,0.0001166232,0.0002590081,0.0001686132],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001983322,"about_ca_system_score_gemma":0.0002238287,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00093119,"about_ca_topic_score_gemma":0.003939887,"domain_scores_codex":[0.9999487,0.000003139582,0.000002884405,0.00001165801,0.00002400955,0.000009613206],"domain_scores_gemma":[0.9999373,0.000008842066,0.0000153905,0.00001092989,0.00001804525,0.000009533858],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001093317,0.000002651427,0.000100189,0.00001673679,0.000002873812,0.00004002968,0.00001191495,0.00003784358,0.9993989,0.0001017473,0.0000263287,0.0002497455],"study_design_scores_gemma":[0.00001573123,0.00009895476,0.002990467,0.0000038599,0.00001333941,0.0001414592,0.00003490199,0.001300626,0.9944208,0.00004839007,0.0009274745,0.000003877599],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9953749,0.0002869843,0.002450699,0.00003658372,0.00003191723,0.00001138544,0.0001623713,0.00005762798,0.001587492],"genre_scores_gemma":[0.9963323,0.0001456628,0.002531335,0.000009685406,0.000005594753,0.000005231256,0.0001309268,0.00001422876,0.0008250239],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00093119,"threshold_uncertainty_score":0.002146542,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008408817623699757,"score_gpt":0.2348778044670003,"score_spread":0.2264689868433006,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}