{"id":"W2030619695","doi":"10.1109/coase.2007.4341760","title":"A MEMS Stage for 3-Axis Nanopositioning","year":2007,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microelectromechanical systems; Actuator; Fabrication; Plane (geometry); Coupling (piping); Computer science; Topology (electrical circuits); Physics; Engineering; Electrical engineering; Mechanical engineering; Geometry; Optoelectronics; Mathematics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003379123,0.0005736858,0.0003989709,0.0002720737,0.0006196109,0.0004004139,0.0007576398,0.0008205203,0.004051549],"category_scores_gemma":[0.0004937109,0.0004760076,0.0004398673,0.0001785826,0.0004295296,0.0005944507,0.0006732657,0.0007334467,0.001572115],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005155595,"about_ca_system_score_gemma":0.0006847996,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007981723,"about_ca_topic_score_gemma":0.001385898,"domain_scores_codex":[0.9994875,0.00003748764,0.00002808388,0.00009326149,0.0002963358,0.00005731247],"domain_scores_gemma":[0.9996381,0.00008747998,0.00005903688,0.00007945341,0.0001019899,0.00003402222],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008087333,0.00001759627,0.0003488516,0.00008969569,0.00000956472,0.0001347464,0.00007197662,0.0005900515,0.9823855,0.002031748,0.0009765141,0.01326279],"study_design_scores_gemma":[0.00003587815,0.0004247267,0.002840266,0.00001765017,0.00001971379,0.0007216505,0.0000292609,0.01292336,0.953701,0.0004978558,0.02872968,0.00005899736],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4217282,0.001476039,0.5443631,0.0009722981,0.001293238,0.0008938781,0.001411462,0.003597366,0.02426447],"genre_scores_gemma":[0.5622692,0.0004518344,0.4229418,0.0003128641,0.0001109698,0.0003855838,0.0005782656,0.0002020642,0.01274738],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004051549,"threshold_uncertainty_score":0.01355374,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0104578288800859,"score_gpt":0.2485300372905324,"score_spread":0.2380722084104465,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}