{"id":"W2030857629","doi":"10.1109/jmems.2012.2189936","title":"Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer","year":2012,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":31,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"National Research Council Canada","keywords":"Scanner; Optics; Wafer; Laser scanning; Silicon on insulator; Materials science; Microlens; Silicon; Lens (geology); Laser; Optoelectronics; Physics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004929646,0.0003529607,0.0007263604,0.000177728,0.00006250985,0.0000732228,0.0003382344,0.0002434211,0.00007040072],"category_scores_gemma":[0.00004314032,0.0002267173,0.0001830801,0.0002904639,0.00003995166,0.0001961787,0.00001944458,0.0009887919,0.0001710385],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004719544,"about_ca_system_score_gemma":0.00007823633,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001928674,"about_ca_topic_score_gemma":0.000004627464,"domain_scores_codex":[0.9978617,0.0001123123,0.0007010593,0.0001744608,0.0004188336,0.0007316669],"domain_scores_gemma":[0.9987106,0.0002122539,0.0001935239,0.0002403081,0.0001607501,0.0004825166],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0007399973,0.0005442253,0.0001155338,0.0001305831,0.0007354034,0.00007682727,0.0001631126,0.0008491206,0.980781,0.01221964,0.003008691,0.0006358529],"study_design_scores_gemma":[0.009719428,0.01443987,0.002797574,0.00312495,0.0006665879,0.005458916,0.0007144561,0.04556379,0.82274,0.0003062192,0.09184043,0.002627796],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9933786,0.001029079,0.002420334,0.00009737186,0.001173174,0.0002663175,0.00001750324,0.00009325377,0.001524311],"genre_scores_gemma":[0.99884,0.00004696001,0.0003529543,0.0001868228,0.000389236,0.000009202698,0.000003518915,0.00006962264,0.0001016756],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.158041,"threshold_uncertainty_score":0.9245263,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007859447840482444,"score_gpt":0.2021013128409383,"score_spread":0.1942418650004559,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}