{"id":"W2031435759","doi":"10.1117/12.700565","title":"Stereolithography as a meso-structure for input force reduction to a capacitive force MEMS sensor","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Networks of Centres of Excellence of Canada","keywords":"Microelectromechanical systems; Capacitive sensing; Materials science; Tactile sensor; Capacitance; Electrical engineering; Computer science; Capacitor; Surface micromachining; Fabrication; Optoelectronics; Electrode; Voltage; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009475736,0.0002762401,0.0001565289,0.0002751395,0.0001464376,0.0002618651,0.0003799738,0.0002608655,0.001334093],"category_scores_gemma":[0.0001231274,0.0003488787,0.0002052083,0.0001817459,0.0002219192,0.0002286518,0.0001908204,0.0004347681,0.0007417812],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000360574,"about_ca_system_score_gemma":0.0003939143,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005642449,"about_ca_topic_score_gemma":0.002051275,"domain_scores_codex":[0.9997953,0.000008455387,0.000008672294,0.000034129,0.0001314477,0.00002204202],"domain_scores_gemma":[0.9999036,0.00001806897,0.00002908891,0.0000216385,0.00001879619,0.00000882635],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001021628,0.000008624901,0.00005888752,0.0000327496,0.000001333184,0.00003689729,0.00001377284,0.0001419781,0.9953002,0.0003181217,0.000111066,0.003966244],"study_design_scores_gemma":[0.000009170959,0.0001679455,0.001607887,0.000005006686,0.000005898756,0.0001663291,0.00001238389,0.002710291,0.9872066,0.00006803287,0.008034995,0.00000552502],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7945047,0.002662387,0.1736252,0.0004648298,0.0004741546,0.0003143343,0.0009056668,0.001922886,0.02512588],"genre_scores_gemma":[0.8138362,0.00140879,0.1695286,0.0003426734,0.00009107806,0.0001675659,0.0005315686,0.0001625445,0.01393094],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001334093,"threshold_uncertainty_score":0.004463017,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008661421226839064,"score_gpt":0.2328223476611425,"score_spread":0.2241609264343035,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}