{"id":"W2031765626","doi":"10.1143/jjap.45.2997","title":"Grating Metal Structure with Low-K Benzocyclobutene and Electroplated Copper for High-Q Spiral Inductors","year":2006,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Radio Frequency Integrated Circuit Design","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"National Research Council Canada","keywords":"Benzocyclobutene; Inductor; Materials science; Electroplating; Equivalent series resistance; RFIC; Copper; Grating; Spiral (railway); Optoelectronics; Q factor; Metal; Composite material; Metallurgy; Electrical engineering; CMOS; Engineering; Mechanical engineering; Layer (electronics)","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001041485,0.000259176,0.0003840303,0.00007665158,0.00007893376,0.00005468091,0.0001358916,0.00009313834,0.000005266725],"category_scores_gemma":[0.000005552815,0.0001899417,0.00005346828,0.0003061724,0.00005292703,0.000257611,0.000001767694,0.0003726141,5.7074e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001073805,"about_ca_system_score_gemma":0.00003934614,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001812689,"about_ca_topic_score_gemma":0.000008417816,"domain_scores_codex":[0.9988593,0.00001017534,0.0003893766,0.0001403587,0.0002431414,0.0003576179],"domain_scores_gemma":[0.9994078,0.00005615237,0.0001757469,0.0001207672,0.0001488339,0.00009070334],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007217423,0.0000214666,0.0001459948,0.00002809349,0.0001482797,0.000009689164,0.0002654314,0.1087098,0.8858579,0.003854976,0.00008755126,0.0007986887],"study_design_scores_gemma":[0.001571633,0.0002610431,0.001190083,0.00003038907,0.0001346102,0.0002151085,0.0002473531,0.002221322,0.9804662,0.01330521,0.00001667619,0.0003403707],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9975964,0.00005765096,0.001336615,0.000007446632,0.00009085651,0.0002147278,0.00001504084,0.0000618799,0.0006194004],"genre_scores_gemma":[0.9979849,0.000002930339,0.001486143,0.000022611,0.000416929,0.000008563879,0.00001528927,0.00005916736,0.000003424419],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1064884,"threshold_uncertainty_score":0.7745596,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004293859553219479,"score_gpt":0.1764717147631269,"score_spread":0.1721778552099074,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}