{"id":"W2031816655","doi":"10.1080/10584580215402","title":"An Effective Interlayer Dielectric and Passivation Scheme Using Reactively Sputtered AL 2 O 3 for (Ba,Sr)TiO 3 Capacitors","year":2002,"lang":"en","type":"article","venue":"Integrated ferroelectrics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Fraser Health","funders":"","keywords":"Passivation; Materials science; Capacitor; Dielectric; Fabrication; Annealing (glass); Optoelectronics; Thin film; Silicon; Barrier layer; Sputtering; Layer (electronics); Electronic engineering; Nanotechnology; Composite material; Electrical engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001478322,0.0003183375,0.0003196007,0.0003555812,0.0001099819,0.0001636807,0.0001321963,0.0002114632,0.00005486561],"category_scores_gemma":[0.0001457407,0.0002938285,0.00005855443,0.0006486994,0.00003178462,0.0004721312,0.000008577805,0.0002789084,0.000007054271],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002938348,"about_ca_system_score_gemma":0.0000127222,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001086538,"about_ca_topic_score_gemma":0.00001975438,"domain_scores_codex":[0.9987147,0.00006201691,0.0003109179,0.000347443,0.0001395539,0.0004253824],"domain_scores_gemma":[0.9992704,0.0001536581,0.0000893091,0.0001789055,0.0001989956,0.0001087122],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00005588448,0.00004667218,0.0002137676,0.00004543179,0.00009325768,0.000003200266,0.0004119192,0.0001202631,0.9810274,0.00008816221,0.001000805,0.01689321],"study_design_scores_gemma":[0.0006309887,0.0004227685,0.0007807676,0.00005319011,0.00005562247,0.00003142905,0.0001101647,0.6530489,0.3422869,0.0001903922,0.001952861,0.0004360459],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9830522,0.00069413,0.01439419,0.00002660781,0.0006478063,0.0005496594,0.00003463445,0.0003574339,0.000243367],"genre_scores_gemma":[0.9973215,0.0001099568,0.002017787,0.000126361,0.0002011336,0.00008063289,0.00004861265,0.00007681766,0.00001715977],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.6529287,"threshold_uncertainty_score":0.9999514,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02667153607092141,"score_gpt":0.2482944860404723,"score_spread":0.2216229499695509,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}