{"id":"W2032004008","doi":"10.1016/j.nimb.2011.02.037","title":"First direct-write lithography results on the Guelph high resolution proton microprobe","year":2011,"lang":"en","type":"article","venue":"Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Guelph","funders":"","keywords":"Microprobe; Materials science; Lithography; Optics; Quadrupole magnet; Resolution (logic); Beam (structure); Optoelectronics; Physics; Nuclear physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004471645,0.0003297696,0.0004245188,0.000343959,0.0007476571,0.0006203047,0.0003592317,0.0006399683,0.003258016],"category_scores_gemma":[0.001209814,0.0003301596,0.0002196026,0.0002476462,0.0006702901,0.0006972403,0.0006214941,0.0005338495,0.00084007],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003906212,"about_ca_system_score_gemma":0.0002574697,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001199398,"about_ca_topic_score_gemma":0.002930385,"domain_scores_codex":[0.9996749,0.00004574977,0.00001917742,0.0000558817,0.000151388,0.00005289089],"domain_scores_gemma":[0.9989746,0.0004904213,0.00005178955,0.0002146394,0.0002038716,0.00006477713],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000308036,0.00004687463,0.00110788,0.0004087229,0.00005234098,0.0004286423,0.0005440746,0.0005872442,0.9724701,0.001796452,0.003012668,0.01923702],"study_design_scores_gemma":[0.00001029467,0.0001512579,0.003483122,0.00000777057,0.00001558317,0.0002398194,0.00005334966,0.0005680533,0.9889004,0.0001656655,0.00638661,0.00001809888],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.900717,0.008956665,0.04795361,0.001790945,0.0005384728,0.0003399367,0.00244449,0.002148796,0.03511019],"genre_scores_gemma":[0.9289404,0.001679235,0.04074579,0.0002755305,0.00006095288,0.00008274474,0.0007316749,0.000470063,0.02701374],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003258016,"threshold_uncertainty_score":0.01089919,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.052807236619072,"score_gpt":0.3526405016684424,"score_spread":0.2998332650493704,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}