{"id":"W2032056278","doi":"10.1016/j.tsf.2008.05.022","title":"Optical and chemical characterization of expanding thermal plasma-deposited carbon-containing silicon dioxide-like films","year":2008,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":22,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Silicon dioxide; Characterization (materials science); Carbon dioxide; Silicon; Carbon film; Materials science; Thin film; Plasma; Chemical engineering; Thermal; Nanotechnology; Chemistry; Analytical Chemistry (journal); Optoelectronics; Environmental chemistry; Composite material; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003334099,0.0001868361,0.0003718509,0.00005001867,0.0001090226,0.00003451402,0.0001873995,0.0001608343,0.0002291373],"category_scores_gemma":[0.00008245237,0.0001524097,0.00006320255,0.00009182381,0.0002918107,0.0002123914,0.0001680574,0.0001699666,0.00000827219],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002610587,"about_ca_system_score_gemma":0.00003933916,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001485615,"about_ca_topic_score_gemma":0.000002369247,"domain_scores_codex":[0.9985823,0.0000538236,0.0004373335,0.0003745874,0.0002399607,0.0003119931],"domain_scores_gemma":[0.9993076,0.000105416,0.0001366793,0.0002706008,0.00006188278,0.0001177933],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001220463,0.00006009901,0.003872429,0.00003391875,0.000009655081,0.00001469129,0.002474821,0.00002469894,0.9931999,0.00006683129,0.000007970431,0.000112945],"study_design_scores_gemma":[0.0004779336,0.000120732,0.01158939,0.00007342002,0.00001731495,0.00007486304,0.0001352917,0.01046651,0.9768377,0.00001072875,0.000007249285,0.0001888688],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.998401,0.0000287992,0.00005151748,0.00007981042,0.0003661111,0.0001863731,0.00001579547,0.0000939276,0.0007766257],"genre_scores_gemma":[0.9991146,0.00001625171,0.000575037,0.00009485848,0.0000708859,0.00001372655,0.00001990067,0.00002107457,0.00007366467],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0163622,"threshold_uncertainty_score":0.6215085,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01508856955389627,"score_gpt":0.2421769141202625,"score_spread":0.2270883445663663,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}