{"id":"W2032056278","doi":"10.1016/j.tsf.2008.05.022","title":"Optical and chemical characterization of expanding thermal plasma-deposited carbon-containing silicon dioxide-like films","year":2008,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":22,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Silicon dioxide; Characterization (materials science); Carbon dioxide; Silicon; Carbon film; Materials science; Thin film; Plasma; Chemical engineering; Thermal; Nanotechnology; Chemistry; Analytical Chemistry (journal); Optoelectronics; Environmental chemistry; Composite material; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001179794,0.0002008183,0.0001258693,0.000294505,0.0002100543,0.0002091543,0.0001813385,0.0002338518,0.000803108],"category_scores_gemma":[0.0002657984,0.0001477773,0.00007249016,0.0002573883,0.0002100677,0.0001731945,0.00007997597,0.0001905323,0.00007712117],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001935388,"about_ca_system_score_gemma":0.0001561434,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001794392,"about_ca_topic_score_gemma":0.00274581,"domain_scores_codex":[0.999902,0.000007668938,0.000004225256,0.00001806903,0.00005144639,0.00001660655],"domain_scores_gemma":[0.9998149,0.00005765046,0.00003597665,0.00001612615,0.0000553692,0.00001996011],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000290741,0.000006842978,0.0001669586,0.00001384184,0.000001882085,0.00003152757,0.00001229164,0.00007099605,0.9991714,0.00002605673,0.00002656531,0.0004426064],"study_design_scores_gemma":[0.000007369744,0.0001203256,0.008054948,0.000001711269,0.000006679467,0.00008307315,0.00003504349,0.0009552465,0.9902679,0.00001054494,0.0004537974,0.000003331741],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9976528,0.0002336407,0.000430445,0.00001718393,0.00000652641,0.000007636304,0.00008172087,0.00001609228,0.001553972],"genre_scores_gemma":[0.9971939,0.0001612865,0.001103746,0.00001675785,0.000008123097,0.000008196151,0.0001613849,0.000008021527,0.001338506],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001794392,"threshold_uncertainty_score":0.003567934,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01508856955389627,"score_gpt":0.2421769141202625,"score_spread":0.2270883445663663,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}