{"id":"W2032584242","doi":"10.1007/s11664-005-0158-6","title":"Influence of substrate on high-temperature behavior of copper film studied in situ by electron backscatter diffraction","year":2005,"lang":"en","type":"article","venue":"Journal of Electronic Materials","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"McGill University","funders":"","keywords":"Electron backscatter diffraction; Materials science; Texture (cosmology); Scanning electron microscope; Copper; Electron diffraction; Dislocation; Diffraction; Substrate (aquarium); Composite material; Silicon; Crystallography; Condensed matter physics; Analytical Chemistry (journal); Optics; Microstructure; Chemistry; Metallurgy; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001988063,0.0002975834,0.000431336,0.0001617082,0.0003215705,0.0006838284,0.0002373828,0.0002960951,0.00186305],"category_scores_gemma":[0.0006292435,0.0004237965,0.0001475554,0.0002898232,0.0003834036,0.0004188254,0.0001875914,0.0004222112,0.0002697352],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002958093,"about_ca_system_score_gemma":0.0001800562,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001297019,"about_ca_topic_score_gemma":0.002173254,"domain_scores_codex":[0.9998498,0.00002344054,0.000009701153,0.00003403225,0.00004144674,0.00004153506],"domain_scores_gemma":[0.9993306,0.0003549838,0.00008662204,0.00007419229,0.0001169332,0.00003656743],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004084273,0.00002072626,0.001334462,0.0001031146,0.00002208074,0.0002709601,0.0001514329,0.0002946171,0.9957978,0.00009787775,0.0001062308,0.001392313],"study_design_scores_gemma":[0.00001292123,0.0001550548,0.008306762,0.000007511562,0.00002070463,0.0001105727,0.0001121755,0.001326585,0.9894186,0.00002672397,0.0004939283,0.000008425493],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9968382,0.0007655263,0.0008239498,0.00004713321,0.00002492397,0.00000639027,0.0001180958,0.00002918173,0.001346503],"genre_scores_gemma":[0.9985126,0.0003617202,0.0005048032,0.00001922125,0.000006993469,0.000005172757,0.00009728337,0.00002641443,0.0004657308],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00186305,"threshold_uncertainty_score":0.00623256,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005200924861074285,"score_gpt":0.2544058654373801,"score_spread":0.2492049405763059,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}