{"id":"W2033793651","doi":"10.1088/0960-1317/19/11/115014","title":"A sacrificial SU-8 mask for direct metallization on PDMS","year":2009,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":32,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Composite material; Optoelectronics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002303439,0.0005692458,0.0002714459,0.0003289256,0.0002600632,0.0002519589,0.0006469088,0.0004161439,0.001843181],"category_scores_gemma":[0.0002430719,0.0005309395,0.0002857271,0.0001697158,0.0002000653,0.0003649773,0.0003292754,0.0007978457,0.001219953],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002426771,"about_ca_system_score_gemma":0.0002599375,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001526532,"about_ca_topic_score_gemma":0.0004434422,"domain_scores_codex":[0.9997464,0.00001329358,0.00002287062,0.00004426086,0.000143459,0.00002966477],"domain_scores_gemma":[0.9998119,0.00004309513,0.00004969376,0.00004774092,0.00002671814,0.00002084284],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001162574,0.000008333714,0.00004068806,0.00006295276,0.00000287984,0.00007334091,0.00000915302,0.00006171413,0.9944503,0.0002326916,0.0001953396,0.004851033],"study_design_scores_gemma":[0.00001250301,0.0001152138,0.0007237137,0.000005702626,0.000008995547,0.0008740471,0.000004716043,0.001262962,0.980435,0.0001211537,0.01642454,0.00001136296],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.443153,0.007377414,0.530785,0.0007702166,0.001366554,0.0004843868,0.001296039,0.003944737,0.01082258],"genre_scores_gemma":[0.493099,0.003566617,0.4911095,0.0002545996,0.0002095303,0.0002926761,0.0009579273,0.0001724526,0.01033777],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001843181,"threshold_uncertainty_score":0.006166041,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005311810147532708,"score_gpt":0.2004736194656122,"score_spread":0.1951618093180795,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}