{"id":"W2033820723","doi":"10.1143/jjap.51.110205","title":"Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range","year":2012,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Silicon nitride; Materials science; Refractive index; Silicon; Amorphous silicon; Stoichiometry; Optoelectronics; Plasma; Amorphous solid; Thin film; Nitride; Fabrication; Analytical Chemistry (journal); Nanotechnology; Chemistry; Crystalline silicon; Layer (electronics); Crystallography","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007303164,0.0002492504,0.000217763,0.0001175836,0.00009410111,0.0001595129,0.0002318123,0.0001774339,0.0004195335],"category_scores_gemma":[0.0001135628,0.0002347863,0.0001159465,0.0001456131,0.0001174579,0.0001428991,0.0001133473,0.0002086363,0.0001255172],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00019661,"about_ca_system_score_gemma":0.0001358532,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005981361,"about_ca_topic_score_gemma":0.001714032,"domain_scores_codex":[0.999949,0.000004458129,0.000002778372,0.00001227597,0.0000219106,0.000009639142],"domain_scores_gemma":[0.9999413,0.00001512821,0.0000173296,0.000004587777,0.00001191988,0.000009694623],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006121179,0.000003431209,0.00003063089,0.00001508657,0.000001429993,0.000009864466,0.000004101938,0.00005116259,0.9996547,0.00001420574,0.000009458406,0.0001998345],"study_design_scores_gemma":[0.000005801258,0.00005481618,0.001160245,0.000001887291,0.00000583229,0.00004298889,0.00000791218,0.001233777,0.9970255,0.000009892489,0.0004495883,0.000001726941],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9945822,0.0006990822,0.00304098,0.00002558725,0.00001551766,0.00002551248,0.0001228274,0.00004006322,0.001448089],"genre_scores_gemma":[0.9885901,0.0007954804,0.008683163,0.00002046142,0.000008801748,0.00003558445,0.000216675,0.00002534148,0.001624307],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005981361,"threshold_uncertainty_score":0.001426458,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0143109561233356,"score_gpt":0.2528877795017326,"score_spread":0.238576823378397,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}