{"id":"W2033884004","doi":"10.1117/12.2005119","title":"Fabrication of thin vertical mirrors through plasma etch and KOH:IPA polishing for integration into MEMS electrostatic actuators","year":2013,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Boreal Laser (Canada); Norcada (Canada); University of Alberta","funders":"","keywords":"Microelectromechanical systems; Polishing; Fabrication; Actuator; Materials science; Chemical-mechanical planarization; Plasma; Engraving; Optoelectronics; Electrical engineering; Composite material; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001650856,0.000427843,0.0002721894,0.0001899138,0.0001652806,0.0003456436,0.0005035179,0.0003040518,0.0005299558],"category_scores_gemma":[0.0002278184,0.0004549905,0.0003158272,0.0001328161,0.0001908508,0.0002987615,0.0003357527,0.0004047652,0.0004264025],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002648043,"about_ca_system_score_gemma":0.0003203524,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006495329,"about_ca_topic_score_gemma":0.001005208,"domain_scores_codex":[0.9998267,0.000006679728,0.00001235214,0.00003419954,0.00009661509,0.00002336496],"domain_scores_gemma":[0.999885,0.00002052248,0.00003203257,0.00001911829,0.0000327695,0.00001058764],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004102078,0.00000271819,0.00004280619,0.00002223115,0.000002702072,0.00002271116,0.000007983582,0.0001180803,0.9978353,0.00009903457,0.00002366191,0.001818675],"study_design_scores_gemma":[0.000004102216,0.00006010935,0.0006447848,0.000003565359,0.000007011392,0.00008530081,0.000007003626,0.001571217,0.995375,0.00004249014,0.002193955,0.000005477658],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8394765,0.003063075,0.1486796,0.0001735123,0.0002038196,0.0002821703,0.0005529039,0.001135354,0.00643315],"genre_scores_gemma":[0.6861414,0.002665966,0.3050714,0.00007957419,0.00003774164,0.0002114724,0.0004192304,0.0001434728,0.005229711],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006495329,"threshold_uncertainty_score":0.001921356,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01282275181754329,"score_gpt":0.2488648108094301,"score_spread":0.2360420589918868,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}