{"id":"W2034421244","doi":"10.1109/ipfa.2008.4588162","title":"Conductive Atomic Force Microscopy failure analysis for SOI devices","year":2008,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Conductive atomic force microscopy; Electrical conductor; Silicon on insulator; Materials science; Silicon; Substrate (aquarium); Optoelectronics; Current (fluid); Atomic force microscopy; Nanotechnology; Node (physics); Microscopy; Electrical engineering; Engineering; Optics; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002196091,0.0003216058,0.0002183126,0.001424722,0.000660631,0.0002327312,0.0003191041,0.0004682044,0.001743701],"category_scores_gemma":[0.0004691799,0.0001621648,0.0001841498,0.0004050242,0.00026103,0.0003506645,0.000206249,0.0002085599,0.0002335308],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003610279,"about_ca_system_score_gemma":0.000176716,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002307324,"about_ca_topic_score_gemma":0.002752615,"domain_scores_codex":[0.9998276,0.00001102742,0.00000850819,0.00003193167,0.00009918963,0.00002172328],"domain_scores_gemma":[0.9995905,0.00009317863,0.00005273919,0.00005649856,0.0001806467,0.00002641822],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006998776,0.00003276996,0.00310806,0.00005805345,0.000007783489,0.0001763749,0.0001513943,0.0007537588,0.9814162,0.0006840958,0.0006702369,0.01287116],"study_design_scores_gemma":[0.0000201986,0.0004788488,0.05998551,0.00002139841,0.00002460052,0.001367532,0.0002161354,0.04886991,0.8826884,0.0009787399,0.005289989,0.00005873727],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.957531,0.0006634719,0.03683727,0.0001404252,0.00004635725,0.00006554418,0.0006882239,0.0004416356,0.003586165],"genre_scores_gemma":[0.9774755,0.0002801789,0.0199908,0.00002368179,0.00001293033,0.00005389582,0.0003121871,0.00003126273,0.001819562],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002307324,"threshold_uncertainty_score":0.005833268,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01612578259339391,"score_gpt":0.2317500457718022,"score_spread":0.2156242631784083,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}