{"id":"W2035653265","doi":"10.1088/0960-1317/23/6/065029","title":"SU-8- and PDMS-based hybrid fabrication technology for combination of permanently bonded flexible and rigid features on a single device","year":2013,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced Sensor and Energy Harvesting Materials","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Polydimethylsiloxane; Materials science; Fabrication; Layer (electronics); Microfluidics; Polymer; Substrate (aquarium); Chip; Nanotechnology; Composite material; Optoelectronics; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001961909,0.0005967459,0.000335893,0.0004039619,0.0002244988,0.0003582674,0.0009515284,0.000523854,0.001631887],"category_scores_gemma":[0.0002668618,0.0004540689,0.000429727,0.0002878579,0.00027544,0.0006952438,0.0006329305,0.000564474,0.0009404066],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003279449,"about_ca_system_score_gemma":0.0002971466,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001859135,"about_ca_topic_score_gemma":0.000560543,"domain_scores_codex":[0.9996678,0.00001739765,0.00002942784,0.00008495581,0.0001500377,0.00005038182],"domain_scores_gemma":[0.9997922,0.00003077719,0.00006412438,0.00006515369,0.00002656534,0.00002121965],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002168972,0.00001775233,0.0001395352,0.0001149309,0.00001264178,0.0001314649,0.00002237869,0.0003817663,0.989606,0.0007597752,0.0002320502,0.008560001],"study_design_scores_gemma":[0.00001259111,0.0002014111,0.0008956155,0.000009481066,0.00003060064,0.000397976,0.00001781955,0.004115184,0.9828912,0.0002187162,0.01118707,0.00002243157],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7243865,0.004218657,0.2539277,0.0002908468,0.0009477572,0.0004276542,0.001026186,0.002227006,0.01254778],"genre_scores_gemma":[0.7591863,0.001350514,0.2300482,0.0001650171,0.0001291556,0.0002992882,0.0006174109,0.0001188332,0.008085269],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001631887,"threshold_uncertainty_score":0.005459189,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00806689345772932,"score_gpt":0.2013777964860266,"score_spread":0.1933109030282973,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}